Albert P. Pisano (Advisor)

Lilla Smith

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Ph.D. 2015

David Rolfe

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Ph.D. 2015

Joanne Lo

Alumni
Mechanical Engineering
Professor David A. Horsley (Advisor)
Professor Albert P. Pisano (Advisor)
Ph.D. 2016

Colby Bellew

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Ph.D. 2002

An SOI Process for Integrated Solar Power, Circuitry and Actuators for Autonomous Microelectromechanical Systems

Colby Bellew
Albert P. Pisano
2002

A new process has been developed for fabricating integrated, solar-powered microelectromechanical systems (MEMS) on a silicon-on-insulator (SOI) wafer. The process provides for the fabrication of high voltage solar cell arrays, high aspect ratio electrostatic actuators and high voltage switches which can be controlled with a low voltage input. To demonstrate the capabilities of this process, an electrostatic actuator was operated with power provided by an on-chip solar array and controlled with an on-chip power switch.

One of the primary challenges in creating a successful...

Silicon Carbide Micro-Extensometers for Harsh Environments

Robert Azevedo
Albert P. Pisano
Oliver M. O'Reilly
Andrew Neureuther
2007
This dissertation describes the initial development of a microelectromechanical silicon car-bide (SiC) strain sensor with an integrated flexible ceramicencapsulation. Such sensors are well suited for real-time harsh environment structural health monitoring applications. This work covers three major aspects of the sensor development: 1) design of the sense elements, 2) understanding how the sensor substrate transmits the strain to the sense elements, and 3)...

Design and Evaluation of a MEMS Offset Capacitive Comb Strain Sensor

Robert Azevedo
Albert P. Pisano
Oliver M. O’Reilly
2004

An offset, gap-closing capacitive MEMS strain sensor for detecting strain of steel has been designed, fabricated, and tested both in isolation and bonded to steel. This extensometer approach benefits from low sensitivity to thermal noise typical of capacitive sensors. The design utilizes an offset parallel-plate array design so that we can achieve differential sensing in a single device lay...

Robert Azevedo

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Ph.D. 2007

APP49: MEMS Rotary Engine Power System / 2.4 mm Rotary Engine with Integrated Generator

Aaron Knobloch
2003

The MEMS Rotary Engine Power System (MEMS) 2.4 mm engine is the power generating source for the MEMS REPS and it will be the first design to be integrated with an electric generator.

Project end date: 07/30/03

APP50: MEMS Rotary Engine Power System / 1 mm Engine Design and Fabrication

Kelvin Fu
2003

The development of a portable power system using liquid hydrocarbon as fuel promises significant advantages in energy density over conventional batteries. The goal of MEMS Rotary Engine Power System (REPS) is to fabricate a small scale (1.2mm^3 displacement) rotary (Wankel) engine with an integrated electric generator and all necessary ancillary equipment (thermal management, fuel delivery, thermal packaging, etc.).

Project end date: 07/30/03