Albert P. Pisano (Advisor)

Satinderpal Pannu

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Ph.D. 1998

Kyle Lebouitz

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Ph.D. 1998

MEMS Microshells for Microneedles, Microscale Fluid Visualization, and Vacuum Packaging of Microdevices

Kyle Lebouitz
Albert P. Pisano
Roger T. Howe
Dorian Liepmann
1998
Three MEMS microshell devices are developed in this work. The first device is an isotropically etched microhypodermic injection needle (microneedle); the second device is a transparent, silicon nitride flow tube for fluid flow visualization; and the third...

Planar Microfluidics: Toward Large Scale Integration of Channels, Pumps, Valves, and Fluid Mixers in Microelectromechanical Systems (MEMS)

John Evans
Dorian Liepmann
Albert P. Pisano
Roger T. Howe
1999
A cost effective, manufacturable technology for the large scale integration of microfluidic processing components would find wide application in drug delivery, drug development, micro-biology, genetics, printing and associated fields. This dissertation outlines a design paradigm...

John Evans

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Ph.D. 1998

Timothy Brosnihan

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Ph.D. 1998

An SOI Based, Fully Integrated Fabrication Process for High-Aspect-Ratio Microelectromechanical Systems

Timothy Brosnihan
Albert P. Pisano
Roger T. Howe
David Dornfeld
1998

A low-cost, SOI-based, fully integrated fabrication process for high-aspect-ratio MEMS has been developed and demonstrated. The fully integrated SOI MEMS process uses only two MEMS masking steps plus a standard foundry CMOS process to form sensors and actuators with on-chip electronics. The test vehicle for this process was a 50um tall, in-plane, linear accelerometer with sigma-delta force balanced, capacitive sense electronics. The accelerometer had 25uG/Hz noise floor and +/- 1.75 G full range.

Using a modular process approach, fully integrated MEMS devices...

MicroElectroMechanical Devices and Fabrication Technologies for Radio-Frequency Analog Signal Processing

Darrin Young
Bernhard E. Boser
Robert G. Meyer
Albert P. Pisano
1999
The proliferation of wireless services creates a pressing need for compact and low cost RF transceivers. Modern sub-micron technologies provide the active components needed for miniaturization but fail to deliver high quality passives needed in ...

Nick Talbot

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Ph.D. 1999

Microfabricated Microneedles for Minimally Invasive Drug Delivery, Sampling and Analysis

Jeffrey Zahn
Dorian Liepmann
Albert P. Pisano
Frank Tendick
2001

Utilizing current Micro Electro Mechanical Systems (MEMS) technologies, different microneedle designs have been fabricated and integrated with various microfabricated microfluidic devices. microneedle technology promises to revolutionize health care by allowing the precise injection of therapeutic agents to prescribed locations below the skin. In addition, microneedles can be used for sample collection for biological analysis, delivery of cell or cellular extract based vaccines, and sample handling providing interconnection between the microscopic and macroscopic world. Microneedsl are...