Physical Sensors & Devices

Research that includes:

  • Silicon MEMS actuators: comb, electro-thermal, and plastic deformation
  • Precision electronic sensing and measurements of capacitive, frequency, and coulombic MEMS variables
  • Structures and architectures for gyroscopes, accelerometers, micro strain gauges for direct application to rigid structures e.g., steel, and levitated MEMS

BPNX1061: 3D Imaging Using PMUTs (New Project)

Nikita Lukhanin
Divij Muthu
Mostafa Sedky
Megan Teng
Tofic Esses
Linda Liu
Suraj Chamakura
Ryan Johnson
Chun-Ming Chen
2026

We have used PMUTs for 3D imaging. based on a 4×4 bimorph, pinned dual-electrode PMUTs array with the transmission beamforming scheme. This project advances the ultrasound-based imaging technique by using the compressed sensing scheme. The goal is to achieve 3D imaging with a low number of transducers and minimum computation for various applications in robotics, wearable electronics, autonomous navigation, and medical diagnostics.

Project is currently funded by: Member Fees

BPNX1022: Multiplexed Gas Sensors

Carla Bassil
Kichul Lee
2026

Gas sensing has long been an area of academic and industrial interest. However, state of the art sensors still lack selectivity and sensitivity when it comes to differentiating gases of similar compositions. In this work, we explore methods to create multiplexed gas sensors that can differentiate these mixtures with high accuracy and long-term stability.

Project is currently funded by: Federal

Ultra-Sensitive Nanosensor for Rapid Detection of PFAS in Simulated Drinking Water

Nikita Lukhanin
Keming Bai
Mia Wang
Declan M. Fitzgerald
Grigory Tikhomirov
Liwei Lin
2026

Per- and polyfluoroalkyl substances (PFAS) are a class of persistent synthetic compounds, often called “forever chemicals,” that pose a significant threat to public health and the environment. Standard detection methods primarily rely on liquid chromatography and mass spectrometry [1], which is expensive, time-intensive, and requires trained personnel and laboratory infrastructure. While emerging approaches using metal-organic frameworks (MOFs), molecularly imprinted polymers, and lateral flow assays have been explored, they have yet to provide a solution that simultaneously offers part-...

3D Imaging via Four PMUT Receivers by Compressed Sensing

Nikita Lukhanin
Divij Muthu
Chaoying Gu
Megan Teng
Kamyar Behrouzi
Chun-Ming Chen
Laura Waller
Liwei Lin
2026

We have successfully demonstrated three-dimensional (3D) ultrasound imaging via compressed sensing using piezoelectric micromachined ultrasonic transducers (pMUTs). This work reports the first experimental demonstration of compressed sensing with pMUTs, achieving 3D image reconstruction near the acoustic wavelength limit by only four receiving elements. Pseudo-random transmission signatures were encoded through frequency and delay modulation to enable high-fidelity reconstruction with a peak signal contrast of 28.7 dB. A 16-element lithium-niobate pMUT array operating at a resonant...

Intelligent Acousto-Electrical Metamaterials (IAM) for Sound Source Detection

Victor Couedel
Haotian Lu
Jiayan Zhang
Desheng Yao
Ananya Bhardwaj
Romiro Contreras
Karim Sabra
Rayne Zheng
2026

Acoustic transducers are essential for object localization and environmental sensing. Conventional transducers rely on piezoelectric crystals, whose acoustic-electric response is fixed by the crystal lattice's inherent asymmetry and orientation. This results in static coupling behavior, necessitating bulky arrays of rigid elements with complex wiring and high computational demands for directional sensing. Here, we report a fundamentally new class of acoustic-electric coupling that emerges from topology-governed charge transport in 3D micro-architected piezoelectric metamaterials. Unlike...

CMOS-Embedded Microfluidics for Channel-Addressable Parallel Readout of SPAD Fluorescence Lifetime Sensors

Max Ladabaum
Alexander Di
Julian M. Bao
Grigory Tikhomirov
Jun-Chau Chien
2026

We present the integration of CMOS-embedded subtractive microfluidics with single-photon avalanche diode (SPAD) fluorescence lifetime sensors, enabling independent channel addressability for parallel readout. Microfluidic channels are realized by selectively wet-etching the back-end-of-line (BEOL) metal routing above the SPAD sensors, reducing the analyte-to-active-region spacing to 7 μm while allowing for precision alignment. Simultaneous readout from two SPADs underneath two separate fluidic channels is demonstrated, establishing a pathway toward a scalable, multiplexed lab-on-CMOS...

BPNX1069: Programmable Self-Assembly of Microparticles (New Project)

Umut Can Yener
Declan M. Fitzgerald
Mostafa Sedky
Huicong Deng
2026

Piezoelectric micromachined ultrasonic transducer (PMUT) arrays provide a compact and scalable platform for synthesizing programmable acoustic pressure fields. In this project, we investigate PMUT-enabled programmable microparticle self-assembly in fluidic environments using dynamically controlled ultrasonic standing waves. Unlike conventional cymatics, which relies on fixed vibrational modes of a single acoustic source, individually addressable PMUT elements enable active control of frequency, phase, and amplitude to generate reconfigurable pressure landscapes. By tailoring...

BPN971: Multispectral Photonic Skin based on Ultrathin Black Phosphorus and Organic Photodetectors

Kyuho Lee
Theodorus Jonathan Wijaya
Yifei Zhan
Hyong Min Kim
Dehui Zhang
Naoki Higashitarumizu
Shu Wang
Shogo Tajima
Shifan Wang
2026

The mid-wave infrared (MWIR) spectral range (λ = 3–8 μm) enables a variety of important sensing and imaging applications, including non-invasive bioimaging, night vision, and autonomous navigation. However, commercial MWIR photodetectors are largely limited to rigid imaging systems based on heteroepitaxial materials. Consequently, there is a growing demand for mechanically flexible MWIR imagers that can expand their functionality and practical applicability.

Recently, photodetectors based on van der Waals (vdW) black phosphorus (BP) flakes have demonstrated highly sensitive room-...

BPNX1004: Low Noise Electrochemical Aptamer-Based Sensing Device

Ya-Chen (Justine) Tsai
2026

The Electrochemical Aptamer-based (E-AB) sensors provide continuous and real-time monitoring of specific target molecules, including proteins, antibiotics, neurotransmitters, and more. Due to the cost-effectiveness compared to enzyme sensing assays, E-AB platforms hold significant promise for point-of-care devices and precision medicine. However, sensitivity remains a challenge, particularly in the complicated environment, such as blood and serum. While research has achieved a noise level in the picoampere range, enhancing sensitivity is crucial for detecting trace amounts of certain...

BPNX1073: Cryogenic CMOS-based Control and Readout of Electrons in Paul Traps (New Project)

Andris Huang
2026

The electron in Paul trap system has been recently proposed as a candidate for qubits in quantum information processing. In such a system, floating electrons are confined in vacuum using oscillating electric fields. Feasibility studies and experimental trapping at room temperature have shown that electrons satisfy all DiVincenzo's criteria, a common standard used to determine whether a system can be a good candidate to perform quantum computation. More importantly, electrons have several advantages in quantum information processing as compared to trapped ions. Electrons are spin-½...