Physical Sensors & Devices

Research that includes:

  • Silicon MEMS actuators: comb, electro-thermal, and plastic deformation
  • Precision electronic sensing and measurements of capacitive, frequency, and coulombic MEMS variables
  • Structures and architectures for gyroscopes, accelerometers, micro strain gauges for direct application to rigid structures e.g., steel, and levitated MEMS

BPNX1004: Low Noise Electrochemical Aptamer-Based Sensing Device

Ya-Chen (Justine) Tsai
2026

The Electrochemical Aptamer-based (E-AB) sensors provide continuous and real-time monitoring of specific target molecules, including proteins, antibiotics, neurotransmitters, and more. Due to the cost-effectiveness compared to enzyme sensing assays, E-AB platforms hold significant promise for point-of-care devices and precision medicine. However, sensitivity remains a challenge, particularly in the complicated environment, such as blood and serum. While research has achieved a noise level in the picoampere range, enhancing sensitivity is crucial for detecting trace amounts of certain...

BPNX1073: Cryogenic CMOS-based Control and Readout of Electrons in Paul Traps (New Project)

Andris Huang
2026

The electron in Paul trap system has been recently proposed as a candidate for qubits in quantum information processing. In such a system, floating electrons are confined in vacuum using oscillating electric fields. Feasibility studies and experimental trapping at room temperature have shown that electrons satisfy all DiVincenzo's criteria, a common standard used to determine whether a system can be a good candidate to perform quantum computation. More importantly, electrons have several advantages in quantum information processing as compared to trapped ions. Electrons are spin-½...

BPNX1055: Integration of Nanostructured materials onto CMOS Devices to realize “Lab–on–Chip” Sensors

Michael Pedowitz
2026

Nanostructured materials have become an exciting area of research for the improvement of traditional electronic sensors. The high surface area to volume ratio of nanoflowers, nano-urchins, and nanoporous materials has allowed them to exhibit significant improvements in limit of detection and sensitivity compared to analogous planar sensors. These complex structures have also demonstrated the capability of improving biofouling resistance in complex media by helping to screen fouling agents from the active surface. Despite these advantages, moving this material beyond the laboratory has...

BPNX1068: Corrosion-Resistant Encapsulation for Long-Term Stable Silicon MEMS Resonators (New Project)

Kyuho Lee
Xintian Liu
Shiwoo Lee
Kathy Doan
2026

Long-term frequency stability of silicon MEMS resonators is fundamentally limited by surface-driven degradation mechanisms, including corrosion, moisture adsorption, surface oxidation, and defect evolution. These processes progressively alter surface energy, mass, stiffness, and internal stress, leading to frequency drift, Q degradation, and reduced device lifetime. This work presents a corrosion-resistant encapsulation strategy that conformally coats silicon resonator surfaces with a chemically robust, high-hardness barrier layer engineered for long-term environmental stability. The...

BPNX1061: Imaging Using PMUTs (New Project)

Nikita Lukhanin
Divij Muthu
Mostafa Sedky
Megan Teng
Tofic Esses
Linda Liu
Suraj Chamakura
Ryan Johnson
Chun-Ming Chen
2026

We use PMUTs for imaging.

Project is currently funded by: Member Fees

BPNX1036: Enhanced Gas Sensing with Machine Learning

Yuan Gao
Wei Yue
2026

Accurate and real-time gas detection is crucial for applications ranging from environmental monitoring to industrial processes. Traditional methods are often limited by low accuracy, slow response times, and high costs. This project introduces a scalable machine learning fusion system that integrates sensor fusion techniques to enhance detection performance. With encoder-decoder architectures and a decision fusion model, our approach significantly improves the accuracy of carbon dioxide sensing, achieving a mean absolute percentage error (MAPE) of 2.97% while reducing response and recovery...

BPNX1029: 3D-Printed Metamaterial Tactile Sensors for Robotic Proprioception

Jiayan Zhang
Haotian Lu
2026

Force decoupling is essential for high-fidelity proprioception sensing in robotic systems. However, existing approaches rely on bulky multi-axis transducers or complex signal post-processing, hindering response speed and scalability. This work presents a force sensor employing a compliant mechanism-inspired meta-structure to mechanically decouple multidirectional forces. The metamaterial structure redistributes internal stiffness to channel force components into desired sensing elements while attenuating off-axis loads. This geometry-driven approach achieves high directional sensitivity (...

BPNX1017: 3D Printing of Functional Materials

Xiru Fan
Kai Zhang
Said Eyyubov
Zhen Wang
2026

3D printing offers unprecedented control over the design and fabrication of functional materials with complex architectures. In this project, we focus on developing textured ceramic structures using advanced 3D printing techniques. By engineering the resin formulation and printing process, we aim to align ceramic grains along designed orientations, enabling anisotropic properties tailored for transducer applications. The study will reveal the processing–structure–property correlations of textured ceramics, demonstrating how controlled grain orientation alignment and microstructural...

BPN971: Multispectral Photonic Skin based on Ultrathin Black Phosphorus and Organic Photodetectors

Kyuho Lee
Theodorus Jonathan Wijaya
Yifei Zhan
Hyong Min Kim
Dehui Zhang
Naoki Higashitarumizu
Shu Wang
Shogo Tajima
Shifan Wang
2026

Embodied systems requires deformable electronic skins capable of pre-touch perception beyond traditional tactile feedback. Here, we report an ultrathin multispectral photonic skin comprising integrated photodetector arrays for thermal and proximity mapping through non-contact optical detection. The platform integrates near-infrared organic photodetectors and mid-wave infrared black phosphorus photodetectors within a unified stack. By replacing thermally mediated mechanisms with a photonic architecture, the skin achieves thermal detection bandwidths in the tens of kilohertz, extending non-...

BPN997: Interface Piezoelectricity-Induced Superconducting Qubit Decoherence

Kerry Yu
Haoxin Zhou
Kadircan Godeneli
Zihuai Zhang
Mutasem Odeh
Shahin Jahanbani
2025

Achieving high-performance quantum computing with superconducting qubits requires a good understanding of the various loss mechanisms that can degrade qubit performance. One such potential loss mechanism is undesired electromechanical coupling mediated by piezoelectric effects. It can occur even in centrosymmetric materials due to interface symmetry breaking. In our recent cryogenic microwave transmission measurements, we observed such interface piezoelectricity at the aluminum-silicon and aluminum-sapphire heterostructures, a widely used material combination in superconducting qubit...