December 9, 2014
Prof Jongbaeg Kim
Yonsei University, Korea
BSAC PhD 2004
December 9, 2014 | 12:30 to 01:30 | 540 Cory Hall
Host: Liwei Lin
Controlled synthesis and adjustment of carbon nanotubes on microstructures and their applications are presented. A top-down, followed by bottom-up, integration process is performed on fully-fabricated MEMS structures to enhance the functionalities of existing MEMS and/or to develop novel sensor and actuator applications. The demonstrated microdevices include micromechanical switches with enhanced lifetime, reversible and continuous latch mechanisms, displacement sensors with high sensitivity, etc. All of the devices were batch-processed for cost-effective manufacturing.
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