Tuesday, 24 October 2023 at Noon | 490 Cory Hall
Registration closed. Watch the seminar recording here. | View seminar slides here.
Carrie Low, Ph.D. (BSAC Alum)
MEMS Technologies, TDK-InvenSense
Host: Jonathan Candelaria
ABSTRACT
We live in the era to witness the changes that MEMS technologies bring to the world and our everyday lives. MEMS was first introduced at BSAC in the 80’s. Nowadays, everyone has several MEMS sensors in their pocket, the car, at work, and at home. However, unlike mainstream CMOS technology, MEMS technology is still a very specialized process in the foundry with unique challenges.
This talk will cover a few technologies that Dr. Low worked on after her BSAC graduation and share the industrial challenges that she has faced in her career, starting with the CMEMS® technology from a BSAC startup company – Silicon Clocks. She will also discuss the current work that she does at TDK/InvenSense in the motion sensor division.
BIO INFO
Carrie Low received her Ph.D. in Electrical Engineering and Computer Sciences from the University of California, Berkeley in 2007. Her thesis, Novel Processes for Modular Integration of Silicon-Germanium MEMS with CMOS Electronics was co-advised by BSAC co-director Prof. Roger Howe and Prof. Tsu-Jae King Liu. Her first job at Silicon Clocks, a BSAC spin-off company to develop CMEMS® technology to make MEMS resonators for timing applications. This CMEMS® technology did not mature to the market, and she joined a material innovation company Intermolucular, then another MEMS startup InSense. Dr. Low currently works on motion sensor products at TDK/InvenSense.
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