BSAC Technology Seminar: Back-End-of-Line Nanoelectromechanical Switches


BSAC Technology Seminar Committee

Jonathan Candelaria
Dalene Schwartz Corey
April 29, 2025

Tuesday, 06 May 2025 at Noon | 490 Cory Hall

Register to attend in person here.

Seminar Speaker, Collin Finnan

Collin Finnan

Electrical Engineering and Computer Science | UC Berkeley
Host: Jon Candelaria


ABSTRACT

Nanoelectromechanical (NEM) switches offer an energy-efficient, scalable alternative to traditional complementary metal-oxide-semiconductor (CMOS) transistors for both logic and memory applications. NEM switches are made using the copper interconnects of a standard CMOS back-end-of-line (BEOL) process, allowing for dense hybrid CMOS-NEM circuits. To date, standalone cantilevers oriented vertically or horizontally have been experimentally demonstrated, as well as 4x2 CMOS-NEM hybrid look-up tables. This presentation discusses future augmentations and applications for NEM switches. First, the benefits of NEMS/MEMS computing and the need for CMOS integration will be introduced, followed by an overview of the device fabrication flow. Then, future device applications will be introduced, including NEMS-based non-volatile crosspoint memory arrays having energy consumption nearly three orders of magnitude smaller than existing embedded memories. Finally, the negative capacitance effect found in ferroelectric will be introduced, and its usage to lower the actuation voltage of NEM switches will be analyzed. 

BIO 

Collin Finnan is a second year Ph.D. student in the Electrical Engineering and Computer Sciences department at UC Berkeley, working under the supervision of Professor Tsu-Jae King Liu. He received his B.S. in electrical engineering in 2023 from the University of Notre Dame, where he studied novel nanoantenna infrared detectors. He currently works on applications and augmentations of back-end-of-line nanoelectromechanical switches for energy-efficient circuits.

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