BSAC Seminar: A Two-Axis Piezoelectric Optical Scanner and Tilting Micromirror with a Newly Developed PZT-Meandering Actuator

November 15, 2011

Dr. Yoshiaki Yasuda

Chief Engineering, Standly Electric Co., R&D Center, Yokohama Japan
November 15, 2011 | 12:00 to 01:00 | 540 Cory Hall, DOP Center Conference Room
Host: John Huggins

In this presentation, we describe a new mechanical design for a Piezoelectric unimorph actuator that generate large static deflection angles by accumulating angular displacement in a cascaded Piezoelectric cantilever formed in a meandering shape. The piezoelectric actuator is processed from a PZT film made by the arc-discharge reactive ion- plating (ADRIP) technique. A MEMS 2D optical scanner for image projection display has been developed by using the piezoelectric unimorph actuators. Stable raster scan by combining resonant motion for the fast horizontal axis (15.8 kHz, optical 40 degrees) and static operation for the slow vertical axis (60 Hz, optical 30 degrees) has made it possible to project bitmap animations (i.e., video). Also, the new actuator design was adopted in a double-gimbal two-dimensional optical tilting-mirror with a 4mm x 6mm footprint. The scanner delivered a relatively large static angle of mechanical deflection (8.6 degrees) at an applied voltage of 20 V in non-resonant operation.

http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4432994

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Jonathan Candelaria
Dalene Schwartz Corey