Dr. Wan-Thai Hsu
CTO, Discera
November 16, 2010 | 12:30 to 01:30 | 540 Cory Hall, DOP Center Conference Room
Host: Clark Nguyen
This seminar first reviews the development history of MEMS resonators and oscillators. The evolution of MEMS resonator designs as well as transducer designs will be discussed, and the interface circuitry that is necessary to deal with special characteristics of MEMS resonators will be presented. Often taken for granted in research environments, MEMS fabrication processes and wafer level packaging technologies are the two key success factors for any MEMS-based products. We will review the progress of the MEMS manufacturing environment from research-oriented facilities to mainstream foundries worldwide, and discuss the trend of MEMS foundry business.
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