Dr. Joshua Lee
University of Cambridge, UK
January 20, 2009 | 12:00 to 01:00 | 521 Cory Hall, Hogan Room
Host: Al Pisano
Micro-electro-mechanical silicon resonators have been seen as a promising alternative to quartz for timing control applications, and have also received much interest for realizing high-sensitivity micro sensors based on the principle of modulating mechanical resonance. This talk will discuss and explore their application to the measurement of mass as well as charge (electrometers), beginning with a survey of areas where charge and mass sensing have been employed, together with the current state of art and challenges faced. A number of device concepts based on resonant microstructures, though not all necessarily resonant sensors will be presented in this talk. The last of these examples includes demonstrating the use of ultra-high Q (over a million) bulk mode resonant elements as platforms for mass sensing. Associated issues regarding enhancing electrical interfaces with micromechanical resonators are highlighted in between. More recent work on studying sources energy dissipation in micromechanical resonators pursuant to enhancing Q will also be discussed, before concluding with a few suggestions and comments on possible trajectories for future investigations and developments.
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