Dr. Tayfun Akin
Director, METU-MEMS Center, Middle East Technical University, Ankara, Turkey
February 4, 2014 | 12:30 to 01:30 | 540 Cory Hall
Host: Clark Nguyen
The Middle East Technical University MEMS Center, which opened in 1995, was the first MEMS program in Turkey. The center has a 1300m² cleanroom area with state-of-the-art MEMS fabrication tools with 4", 6", and 8" wafer processing capability, and has raised $65M in research funding in the past ten years. The METU-MEMS Center has been working on the development of various sensors and actuators, including very low-cost CMOS-based infrared detectors, gyroscopes, accelerometers, RF MEMS devices, energy harvesters and various patented BioMEMS devices.
This presentation will introduce the METU-MEMS Center along with its research activities, summarizing the research achievements of each subject (e.g., gyroscopes showing performances below 1degree/hour; accelerometers showing performances below 10ug with about 130dB dynamic range; RF MEMS switches operating about 3.2 billion cycles).
Also, two start-up companies from METU will be introduced:
Mikrosens is a fabless semiconductor company developing ultra-low-cost infrared detectors with one-mask post-CMOS process, where the first product is a wafer level vacuum packaged 160x120 FPA.
Mikro-Tasarim is also a fabless semiconductor company, developing ROICs for hybrid/monolithic, cooled/uncooled detectors in UV, visible and other wavelengths. Its recent CTIA ROIC for VGA (640x512) SWIR arrays will be introduced. They show a read noise performance of 5-e which is about an order of magnitude smaller than state-of-the-art counter parts in the world market.
www.eee.metu.edu.tr/~tayfun
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