April 30, 2013
Dr. Keith Ortiz
Manager, MEMS Technologies Department, Sandia National Laboratories, Albuquerque
April 30, 2013 | 12:00 to 01:00 | 540 Cory Hall, DOP Center Conference Room
Host: John Huggins
Sandia National Laboratories has conducted research and development in microelectromechanical systems (MEMS) and other microsystem technologies since the mid-1990's. It is well known for its surface micromachining capability, in particular, the SUMMiT V™ process with which it can make rotating gears and machines. This presentation will be a brief overview of current MEMS and microsystems R&D at Sandia and will highlight work in aluminum nitride inertial sensors and RF filters, microsystems-enabled photovoltaic cells, and other technologies.
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