Dr. Niels Quack
Department of Electrical Engineering and Computer Sciences, UC Berkeley
BSAC Postdoctoral Researcher
February 8, 2011 | 12:00 to 01:00 | 540 Cory Hall, DOP Center Conference Room
Host: Ming Wu
State-of-the-art infrared micro-spectrometers can be fabricated using MEMS technologies. An overview of selected MEMS infrared micro-spectrometers will be presented, including discussion of integrated narrow-band tunable mid-infrared detectors and emitters developed at ETH Zürich, Switzerland. In these systems, IV-VI semiconductor thin film technology is used for the fabrication of distributed Bragg reflectors and active layers, whereas the tuning element, a movable micromirror, is fabricated using MEMS technologies. With this concept, very compact systems can be realized. The talk will focus on the mechanically movable MEMS micromirrors used for the tuning of the detection or emitter wavelength. The use of tunable sensors in spectroscopic systems in the mid-infrared is addressed and as application, first carbon monoxide detection measurements are presented. The project is a collaboration between the Thin Film Physics Group and the Institute for Mechanical Systems, both at ETH Zürich, and partially funded by the Gebert Rüf Stiftung.
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