February 6, 2015
Prof. Xinxin Li
Director, State Key Lab of Transducer Technology
Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
February 6, 2015 | 10:00 to 11:00 | 540 Cory Hall
Host: Liwei Lin
This seminar discusses the development and investigation of a MIS single-wafer micromachining technology, sensing effects and micro/nano sensors. Applications include volume manufacturable physical sensors for use in automobiles, smart phones and medical analysis. With combined micro/nano integration, ultra-sensitive biochemical sensors are developed for on-site detection of trace level molecules. In conclusion, the talk will address a self-sensing functional enclosed energy harvester for event-driven, non-power, wireless alarming microsystems and its potential applications.
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