Dr. Evgeni Gusev
Director, Materials and Device R&D, Qualcomm MEMS Technologies
March 30, 2010 | 12:00 to 01:00 | 521 Cory Hall, Hogan Room
Host: John Huggins
Recent developments in micro- and nano-fabrication and photonics allow the fabrication of color displays through manipulation of reflected light in a controlled manner in MEMS/NEMS architectures. The Qualcomm mirasol(TM) display is a high-speed, electrostatically actuated, bistable MEMS device built on a transparent (e.g., glass) substrate. The basic device consists of a suspended conductive membrane serving as a mirror over a partially reflective optical stack. Interference between light reflected from the mirror and from the partially reflective optical stack generates vibrant color. This revolutionary interferometric modulator (IMOD) technology offers significant benefits in viewability, ruggedness, and power reduction which make it attractive for a wide variety of consumer electronics applications. Using IMOD technology as a typical example, I will discuss key device concepts of capacitive MEMS. Basic electromechanical physics of the device, materials and reliability aspects will be addressed. Finally, fabrication principles of the devices, as well as the current status of the technology for large scale manufacturing, will also be discussed.
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