August 18, 2009
Dr. Cora Salm
MESA+ Research Institute/University of Twente, The Netherlands
August 18, 2009 | 12:00 to 01:00 | 540 Cory Hall, DOP Center Conference Room
Host: Tsu Jae King Liu
The main research topic of the Semiconductor Components group of the MESA+ Research Institute at the University of Twente, The Netherlands, is low temperature processing. The main topic of this seminar will be the fabrication, testing and optimization of integrated high voltage electrodes for a gas-filled particle detector by wafer scale CMOS post-processing. Additional highlights of our group's work will be shown, including a fully low temperature TFT fabrication process, high quality low temperature gate oxides with negative oxide charge, and some steps to make on-wafer integrated thermal budget monitors.
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