BSAC Seminar: Devices, Circuits, and Signal Conditioning for Electrostatic MEMS in CMOS Technology

August 10, 2010

Prof. Jordi Madrenas

BSAC Visiting Scholar from the Technical University of Catalunya, Spain, Advanced Hardware Architectures Group
August 10, 2010 | 01:00 to 02:00 | 521 Cory Hall, Hogan Room
Host: Liwei Lin

The recent research work on mixed-signal conducted by the Advanced Hardware Architectures Group of the Technical University of Catalunya (Barcelona) is presented. At the device level, electrostatic actuators that use standard CMOS interconnection metal layers as structural elements and the insulating silicon dioxide as sacrificial layers have been experimentally demonstrated. At the circuit level, a standard-CMOS true translinear element is introduced, as well as a Field-Programmable Analog Array (FPAA) based on that element. Finally, at the processing level, a control method to overcome the pull-in effect in electrostatic actuators and an accelerometer front-end are reviewed. 

www-eel.upc.es/aha

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Jonathan Candelaria
Dalene Schwartz Corey