Qing Bai
Agilent Technologies
April 28, 2009 | 12:00 to 01:00 | 521 Cory Hall, Hogan Room
Host: David Horsley
An increasing variety of applications require MEMS actuators with large travel and force, as well as excellent precision and rapid positioning. In this talk, I'll present an electrically actuated dipole surface drive with unparalleled acceleration of 1000g, a resonant frequency of 17 kHz, and a travel over 15 microns at 70V. This device can be positioned with sub-angstrom resolution and, importantly, operates in ambient conditions which allow it to position milliscale objects in real world environments. For ambient operation, it is critical to passivate the electrodes, yet this passivation can cause deleterious charging effects. Kelvin Force Microscopy (KFM) has been used to directly study the effect of ambient conditions and dielectric stack composition on surface potentials and device performance.
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