Qi Wang
Department of Mechanical Engineering, UC Davis
BSAC Graduate Researcher, David Horsley Group
February 13, 2018 | 12:00 to 01:00 | 490 Cory Hall
Host: Michael Cable
Recent developments in piezoelectric micromachined ultrasonic transducers (PMUT) have led to many applications such as gesture recognition sensors, fat level sensors, and fingerprint sensors, yet issues such as low output pressure, narrow bandwidth, and high fabrication costs still impede full commercialization for more applications. In this presentation, the improvement of PMUT performance will be addressed from the perspective of piezoelectric materials. Scandium aluminum nitride is an ideal replacement for current popular aluminum nitride (AlN) and lead-zirconate-titanate (PZT) to achieve a better balance between performance and fabrication process compatibility. Then, individual PMUT structures and PMUT array designs that utilize the strong acoustic coupling effect will be presented, which achieve high output pressure and wide bandwidth. Finally, a novel surface micromachining process with in-situ vacuum cavities, high fill-factors, and high yields will be introduced to achieve high output pressure and wide bandwidth.
memslab.ucdavis.edu | bsac.berkeley.edu/rsscast
VIEW PRESENTATION
---
Interested in nominating someone to speak at the BSAC Technology Seminar? We welcome you to submit a speaker nomination here