Roya Maboudian (Advisor)

Research Advised by Professor Roya Maboudian

Maboudian Group:  List of Projects | List of Researchers

Silicon Carbide Technologies for Interfacing with the Nervous System

Camilo Diaz-Botia
Michel M. Maharbiz
Philip N. Sabes
Roya Maboudian
Christoph Schreiner
2017

In the past couple of decades we have seen remarkable advances in the integration of biological systems with artificial ones. Our knowledge of both of these worlds has grown exponentially, and in particular our knowledge of the human body. In recent years we have been able to understand and treat diseases we never thought we would, and we have even been able to interface with the body to restore lost functions. Direct interaction with the human brain to read and write information to it has been achieved thanks to the...

Leslie Chan

Alumni
Chemical and Biomolecular Engineering
Professor Roya Maboudian (Advisor)
Ph.D. 2019

Noel Arellano

Alumni
Chemical and Biomolecular Engineering
Professor Roya Maboudian (Advisor)
Ph.D. 2008

Xiang Gao

Alumni
Chemical and Biomolecular Engineering
Professor Roya Maboudian (Advisor)
Ph.D. 2019

Steven DelaCruz

Alumni
Chemical and Biomolecular Engineering
Professor Roya Maboudian (Advisor)
Ph.D. 2020

RM6: Adhesion in MEMS

Robert Ashurst
Elizabeth E. Parker
2004

The ultimate goal of this project is to further develop previous work that involved adhesion studies in MEMS devices.

Project end date: 08/18/04

APP51/RM: Silicon Carbide–Coated Microcomponents for the Rotary Engine–Based Power System

Muthu B.J. Wijesundara
Jingchun Zhang
Carlo Carraro
Bob Ashurst
2016

The goal of this project is to develop a facile method for the realization of SiC-coated Si and SiC-based components for MEMS-based micropower systems.

Project end date: 09/10/04

RM8: Stiction in MEMS

Brian Bush
2005

Electrostatic forces, due to trapped charge or applied voltage, can lead to unwanted adhesion in MEMS devices. We wish to use various techniques, including Electronic Force Microscopy (EFM) and Cantilever Beam Arrays (CBA), to characterize the effect of surface modifications on the electrical properties of MEMS components and to better understand the forces that cause stiction. This knowledge will enable one to develop novel surface modifications or self-assembling monolayers that are specifically designed to combat stiction due to electronic forces.

Project end date:...

RM5/RTH: Silicon carbide process development and characterization for harsh-environment sensors

Jingchun Zhang
Carlo Carraro
2007

Silicon carbide (SiC) is a wide band gap semiconductor with extraordinary properties and has attracted considerable attention for high temperature electronics. Recently, this material is being pursued for microelectromechanical systems (MEMS) applications in harsh environments. The goal of this project is to develop a series of SiC-based sensors and to characterize them for harsh environments. In order to achieve thisgoal, a series of microfabrication technologies including low-temperature CVD, reactive ion etching, and metalization of poly-SiC films need to be developed. In addition...

RTH42: Nanowire-Coupled Resonators

Noel Arellano
2007

We have developed fabrication processes to create top down nanowire coupled resonators. The critical dimensions were defined using a combination of iline lithography, photoresist ashing techniques and focused ion beam trimming. Nanowires are used as mechanical elements to demonstrate low velocity and maximum velocity coupling. We have also demonstrated an bottom up/ top down integrated fabrication process. Features for the top down segment of the fabrication process are aligned to (111) flat on a (110) SOI wafer. A gold based galvanic displacement method selectively deposits catalyst...