Roya Maboudian (Advisor)

Research Advised by Professor Roya Maboudian

William Ashurst

Alumni
Chemical and Biomolecular Engineering
Professor Roya Maboudian (Advisor)
Ph.D. 2003

Surface Engineering for MEMS Reliability

William Ashurst
Roya Maboudian
David B. Graves
Roger T. Howe
2003

The integration of miniaturized mechanical components with microelectronic components has spawned a new technology known as microelectromechanical systems (MEMS). This technology extends the benefits of microelectronic fabrication to sensing and actuating functions. Examples of MEMS devices that have been commercially produced include relatively simple mechanisms such as accelerometers, pressure sensors and digital mirror projectors.

Despite recent progress in micromachining capability, the realization of more complex commercial and specialized use of MEMS is challenged due to...

Jingchun Zhang

Alumni
Chemical and Biomolecular Engineering
Professor Roya Maboudian (Advisor)
Ph.D. 2007

Mohammad Shavezipur

Alumni
Professor Roya Maboudian (Advisor)
PostDoc 2013

Dung-Sheng Tsai

Alumni
Professor Roya Maboudian (Advisor)
PostDoc 2018

Arthur Montazeri

Alumni
Professor Roya Maboudian (Advisor)
PostDoc 2018

Sinem Ortaboy

Alumni
Professor Roya Maboudian (Advisor)
PostDoc 2017

Fang Liu

Alumni
Professor Roya Maboudian (Advisor)
PostDoc 2011

Chuan-Pei Lee

Alumni
Professor Roya Maboudian (Advisor)
PostDoc 2017

Raphael Brechbuehler

Alumni
Chemical and Biomolecular Engineering
Professor Roya Maboudian (Advisor)
M.S. 2016