Richard S. Muller (Advisor)

Cees Hartgring

Alumni
Electrical Engineering and Computer Sciences
Professor Richard S. Muller (Advisor)
Ph.D. 1983

Hsi-Jen Yeh

Alumni
Electrical Engineering and Computer Sciences
Professor Richard S. Muller (Advisor)
Ph.D. 1994

Juan Goicolea

Alumni
Electrical Engineering and Computer Sciences
Professor Richard S. Muller (Advisor)
Ph.D. 1986

Hyuck Choo

Alumni
Electrical Engineering and Computer Sciences
Professor Richard S. Muller (Advisor)
Ph.D. 2007, PostDoc 2008

Shelly Gulati

Alumni
Professor Dorian Liepmann (Advisor)
Professor Richard S. Muller (Advisor)
PostDoc 2007

Rolfe Anderson

Alumni
Electrical Engineering and Computer Sciences
Chemical and Biomolecular Engineering
Professor Richard S. Muller (Advisor)
Ph.D. 1991

Long-Sheng Fan

Alumni
Electrical Engineering and Computer Sciences
Professor Richard S. Muller (Advisor)
Ph.D. 1990

Silicon Electromechanical Microgrippers: Design, Fabrication, and Testing

Chang-Jin Kim
Albert P. Pisano
Richard S. Muller
1991
Microgrippers with jaw spans of l0um have been made from thin films (2um thick) of polycrystalline silicon (polysilicon) by using micromachining technology derived from IC-manufacturing methods. A 500um-long, on-wafer gripper, electrostatically driven by flexible-comb actuators, has been designed, fabricated,...

Michael Daneman

Alumni
Electrical Engineering and Computer Sciences
Professor Richard S. Muller (Advisor)
Ph.D. 1996

Micromachined Photonic Devices and Systems on Silicon

Michael Daneman
Kam Y. Lau
Richard S. Muller
Albert P. Pisano
1996
In this thesis we describe design, fabrication, and characterization of micromachined microphotonic systems on silicon. Surface-micromachining technology is used to produce movable optical components such as microreflectors and microgratings. Microhinges...