Publications

In continuation of the work performed on the micro-capillary pumped loop (CPL), a Micro Electro Mechanical Systems (MEMS) based CPL was designed built and tested to remove heat over a 1 cm2 ...

Accelerometers which are sensitive to inputs perpendicular to the substrate (2-Axis) are the key to monolithic three axis acceleration sensing. The inherent asymmetry of the capacitive interface of the Z-Axis sensing element fabricated in surface micromachining technology with a single...

The design, fabrication and testing of electrostatically drive, high-sensitivity dc voltmeters (ESVs), which have demonstrated sensitivity to 10 mV signals is presented in this report. The ESVs have a micromachined test electrode (third layer of polysilicon) 5 um above the shutter, which provides testing repeatability, increased sensitviy to the input and most importantly the ability to accurately model ESV performance. The theoretical first- and second-harmonic output currents are derived. The results of predicted and experimentally meausred signals are compared and show the validity of...

Resonant microactuators, such as electrostatic combdrives, have proven useful for many small amplitude actuation applications. However, there are a number of micropositioning applications that require a significantly larger travel range than the 10 pm typically achieved by electrostatic combdrives. In addition,...