Publications

Enabled by advances in both integrated circuit technology and micro electromechanical systems (MEMS), the continuing miniaturization and integration of electronics, sensors, and actuators and mechanisms will make it feasible to create insect-sized autonomous microrobots. We propose to create a class of autonomous crawling microrobots the size on the order f 1cm^3 and equipped with a power source, low-power CMOS controller, sensors, wireless communications devices and motorized articulated legs. The work presented here demonstrates how articulated insect legs could be created from rigid...

The past decade has witnessed the establishment of a new field of technology concerned with the manufacture of microscopic sensors and actuators, known as Micro-Electro-Mechanical-Systems (MEMS). The field of MEMS is based on the use of integrated circuit fabrication techniques to create...

In this reseach project the ability of a microfabricated acoustic-wave microsensor to detect volatile organic compounds in indoor air was studied. The microsensors were made in the Berkeley Microfabrication facility following designs developed at the Berkeley Sensor & Actuator Center. The devices were exposed in a four-liter chamber to vapor-phase concentrations of six representative VOCs one at a time: tetrachloroethylene, 1,1,1-trichloroethane, toluene, benzene, ethanol, and formaldehyde. The device sesnitivity to each VOC was computed from the measured oscillator frequency and...