Publications

Understanding and Engineering Surface and Edge Defects of Transition Metal Dichalcogenides

Peida (Peter) Zhao
Ali Javey
Ming C. Wu
Daryl Chrzan
2018
Since the inception of solid state semiconductors and device fabrication techniques, continuous scaling has been implemented as a key driver behind realizing faster electronics while optimizing for power consumption, improving the field in an exponential fashion (i.e. Moore’s Law) and facilitating modern technological advances that otherwise would have been impossible. In recent years, transistor gate length...

A High-Density Carbon Fiber Neural Recording Array Technology: Design, Fabrication, Assembly, and Validation

Travis Massey
Michel M. Maharbiz
Kristofer S.J. Pister
Michael R. DeWeese
2018
Increasingly advanced tools are desired for understanding electrical activity in the brain, whether for basic neuroscience or clinically relevant brain-machine interfaces. Among the many classes of tools available, intracortical neural recording electrodes have the potential advantage of both high spatial and temporal resolution, and depending on the device can be suitable for either acute or chronic applications. To achieve the breadth of desirable characteristics for an acute neural recording array, including minimal...

Impedance Spectroscopy for Surface and Fracture Wounds: Sensor Development and Clinical Application

Monica Lin
Michel M. Maharbiz
2018
Wearable sensors and instrumented implants have wideranging clinical applications, and their continued development in recent years has led to advances inpersonalized healthcare. Innovations in electronics and trends in mobile health are extending the capabilities of traditional medical practice. For a number of clinical conditions, there remains a lack of standardized methods for assessing patients, with physicians often relying on subjective physical...

Walking Silicon: Actuators and Legs for Small-Scale Terrestrial Robots

Daniel Contreras
Kristofer S.J. Pister
Michel M. Maharbiz
Liwei Lin
2018

This dissertation presents work on components and actuators for silicon-based walking centimeter-scale robots. The focus on this work was on the actuators used to drive these robots and the linkages that make the basic structure of the robot leg.

Pin-joints are used as the basic unit of the leg linkages. The pin-joints were tested in terms of robustness and demonstrated high maximum tensile loads of over 5mN and compressive loads in excess of 100mN.

Electrostatic inchworm motors were the...

Low Power, Crystal-Free Design for Monolithic Receivers

Brad Wheeler
Kristofer S.J. Pister
Ali M. Niknejad
Steven D. Glaser
2019

Predictions of the proliferation of hundreds of billions of connected wireless devices have yet to come true. The economics of such deployments becoming feasible require that current wireless modules become smaller, cheaper, and use less power. A typical wireless device combines a RF System-on-Chip with multiple frequency references, passive components, anantenna, and a battery on a printed circuit board. The Single Chip Mote project aims toreduce the size, weight, power, and cost of these devices by eliminating the off...

Chip-scale Lidar

Behnam Behroozpour
Bernhard E. Boser
Ming C. Wu
Liwei Lin
2016

The superiority of lidar compared to radio-frequency and ultrasonic solutions in terms of depth and lateral resolution has been known for decades. In recent years, both application pull such as 3D vision for robotics, rapid prototyping, self-driving cars, and medical diagnostics, as well as technology developments such as integrated optics and tunable lasers have resulted in new activities. Pulsed, amplitude-modulated continuous-wave (AMCW), and frequency-modulated continuous-wave (FMCW) lidars can all be used for ranging. The latter option enables excellent depth resolution at the...

Frequency Tunable MEMS-Based Timing Oscillators and Narrowband Filters

Henry Barrow
Clark T.-C. Nguyen
Kristofer S.J. Pister
Liwei Lin
2015

Both the accuracy of the clocks and ability of filters to achieve bandwidths small enough to select individual channels depend heavily on the accuracy and precision to which the frequency-setting devices they rely on are constructed. Inevitably, fabrication tolerances are finite, which means the ability to attain the highest performance relies on trimming or tuning. This dissertation focuses on methods by which voltage-controlled frequency tuning of capacitively-transduced micromechanical resonators make possible 1) an ultra-compact, low-power 32.768-kHz micromechanical clock...

Tunable Inductive Microelectromechanical Devices Actuated by Linear Vibromotor and the Reliability of Microchannels

Wen-Pin Shih
Norman C. Tien
2004

The motion of micromachined bi-directional electro-thermal vibromotors (BETV) is analyzed using an impact model which takes into account of friction and contact, as well as the compliance of the slider and the impact head. This model is shown to address several important issues on the usage of BETV. These include (a) how to achieve the pull and push mode; (b) avoiding multiple impacts in one actuation cycle; (c) the existence of periodic solution with the same period as the thermal actuator....

A CMOS Biosensor for Infectious Disease Detection

Turgut Aytur
Bernhard E. Boser
Kristofer S.J. Pister
2007

This dissertation describes the design and implementation of an immunoassay platform based on micron-scale magnetic beads. We target the diagnosis of infectious diseases in developing countries, where small, inexpensive, and automated tests are required. Conventional sensor technologies, such as Giant Magneto-Resistors (GMRs), have excellent sensitivity but are expensive and difficult to integrate with other circuitry. The system presented here is built around a CMOS sensor chip and uses standard manufacturing techniques present in the electronics industry. CMOS technology can...

Curved and Bimorph Piezoelectric Micromachined Ultrasonic Transducers (PMUT)

Sina Akhbari
Liwei Lin
George C. Johnson
Tsu-Jae King Liu
2016

Ultrasonic transducers have been realized as nondestructive tools for a variety of applications, such as medical imaging, diagnosis, therapy, nondestructive testing, range finding, and gesture recognitions. Ultrasonic transducers fabricated by MEMS (Microelectromechanical Systems) technologies are known to have distinct advantages over conventional ultrasound devices in terms of device resolution, bandwidth, power consumption, and cost. This work focuses on innovative architectures of Piezoelectric Micromachined Ultrasonic Transducers (pMUT) for improved electro-mechano-acoustical...