Publications

Metal Oxides for Solid State Electronics: Transparent Electrodes, Photoanodes and Transistors

Hyun Sung Park
Liwei Lin
2017

Metal oxides have unique characteristics for a variety of modern applications such as thin films and nano-structured materials in optoelectronic devices and renewable energy productions. In this dissertation, three different metal oxides are developed: solution processed antimony doped tin oxide (ATO) thin films for transparent electrodes; high aspect-ratio ZnO nanowires with ALD (Atomic Layer Deposition) TiO2 for stabilizations as photo-anodes; and spin-coated SnO2 films for TFTs (Thin Film Transistors) in the applications of...

Room Temperature Gas Sensing using Graphene FET

Yumeng Liu
Liwei Lin
2017

In the modern age of gas sensing technologies for broad applications such as internet of things, the capability to make selective, small form factor, and highly responsive sensors for applications such as wearable devices and cell phones could revolutionize the fields of gas sensing systems and fabrications. This thesis aims at developing a millimeter-sized and microwatt-powered sensor prototype using graphene field effect transistors (FETs) by exploring various DC and AC modulation techniques to realize the critical gas sensing features of selectivity and fast recovery speed at room...

Integrated Molecular Diagnostic Platform

Byungrae Cho
Luke P. Lee
Ming C. Wu
Randall J. Lee
2017

Infectious and non-communicable diseases impose a global burden of health on both developing and developed countries despite technological advancements in medicine and healthcare. In this perspective, point-of-care testing (POCT) has been paid attention as an area with enormous potential to solve this problem. Point-of- care molecular diagnostic enables to provide diagnoses from clinical samples to clinicians without wasting time such as sample transporting or sample preprocessing. However, most of nucleic acid diagnostics still are performed in central health facilities because they...

Instrumenting Flexible Substrates for Clinical Diagnosis and Monitoring

Amy Liao
Michel M. Maharbiz
2018

Over the past decade, there has been rapidly growing interest in wearable and implantable devices for a wide range of biomedical applications. For many applications involving prolonged contact with the body, devices that are compliant and can comfortably conform to and move with the patient are highly preferred. These flexible substrates (i.e. clothing, bandages, meshes, catheters, etc) can be instrumented to measure various physiological markers, such as temperature, pH, and oxygenation levels, to better inform clinical care. In this dissertation, I will discuss two examples of...

Piezoelectric Micromachined Ultrasonic Transducers for Ultrasonic Fingerprint Sensors

Joy (Xiaoyue) Jiang
David A. Horsley
Liwei Lin
Bernhard E. Boser
George C. Johnson
2018

A variety of physical mechanisms have been exploited to capture electronic images of a human fingerprint, including optical, capacitive, pressure, and acoustic mechanisms. Compared to other technologies, ultrasonic fingerprint sensors have two major advantages (1) they are insensitive to contamination and moisture on the finger (2) they have the ability to measure images at multiple depths hundreds of microns from the sensor surface. With the maturity of the thin film piezoelectric materials technology and MEMS-CMOS eutectic wafer-bonding process, piezoelectric micromachined...

Ring-shaped and Dual-electrode Bimorph Piezoelectric Micromachined Ultrasonic Transducers

Benjamin Eovino
Liwei Lin
Tsu-Jae King Liu
George C. Johnson
2018

The potential widespread usages of ultrasonic transducer technology have inspired the development of microelectromechanical systems (MEMS)-based devices. The research presented in this dissertation focuses on enhancing the performance of piezoelectric micromachined ultrasonic transducers (PMUTs) by devising innovative design structures, analytically deriving models to understand and optimize performance, and using these findings to demonstrate PMUT-based systems with increased capabilities. The ring-shaped PMUT is firstly introduced as a high-performance PMUT architecture, which is...

Large, Ordered 3D Nanocup Arrays for Plasmonic Applications

Joanne Lo
David A. Horsley
Jack L. Skinner
2010

A large, ordered nanocup array was fabricated and optically characterized. A novel fabrication method that combined Nanoimprint lithography (NIL), soft lithography, and shadow evaporation was designed to create asymmetric nanoparticles in a large (0.5cm x 1cm) array with subwavelength features. Although this fabrication procedure can be used to create many different types of asymmetric nanostructures that are useful in various plasmonic applications, here we fabricated a periodic nanocup array...

Silicon Electromechanical Microgrippers: Design, Fabrication, and Testing

Chang-Jin Kim
Albert P. Pisano
Richard S. Muller
1991
Microgrippers with jaw spans of l0um have been made from thin films (2um thick) of polycrystalline silicon (polysilicon) by using micromachining technology derived from IC-manufacturing methods. A 500um-long, on-wafer gripper, electrostatically driven by flexible-comb actuators, has been designed, fabricated,...

Impact Actuation of Polysilicon Micromechanical Structures

Abraham Lee
Albert P. Pisano
Roger T. Howe
1992
Impact on silicon? One may have the experience in dropping a silicon wafer on the floor, and shattering it to pieces. Or trying to dice a wafer by a diamond marker, and accidentally crunching the edges. These experiences may lead...

Controlled Structure Release for Silicon Surface Micromachining

David Monk
David S. Soane
Roger T. Howe
David B. Graves
1993
Silicon surface micromachining is a new technology that uses many of the common microfabrication techniques found in silicon integrated circuit (IC) production. The key processing step that is the sacrificial layer etch for releasing microstructures which is not ...