The objective of this project is to develop a variable inductor array using lateral-contact microrelays to provide a wide tuning range and design flexibility for building blocks using passive RF MEMS components in wireless communication systems.
The motion of micromachined bi-directional electro-thermal vibromotors (BETV) is analyzed using an impact model which takes into account of friction and contact, as well as the compliance of the slider and the impact head. This model is shown to address several important issues on the usage of BETV. These include (a) how to achieve the pull and push mode; (b) avoiding multiple impacts in one actuation cycle; (c) the existence of periodic solution with the same period as the thermal actuator....