Ming C. Wu (Advisor)

Research Advised by Professor Ming C. Wu

Scalable Quantum Information Processing in Trapped Ions Using Additive Manufacturing

Yiyang Zhi
2026
Spring 2026 BSAC Research Review Presentation View Presentation View Slides...

Zero-Change Foundry Compatible Silicon Photonics MEMS Optical Switch

Arkadev Roy
Daniel Klawson
Jianheng Luo
Erik Anderson
Yiyang Zhi
Sirui Tang
Ming C. Wu
2025

We demonstrate broadband silicon photonics MEMS switch with more than 30 dB extinction ratio using a zero-change foundry compatible process and BEOL post-processing. © 2025 The Author(s)

Keywords: {Microelectromechanical systems;Optical switches;Microswitches;Lasers and electrooptics;Silicon photonics;Extinction ratio;Foundries;Broadband communication;Electro-optical waveguides}

BPNX1012: All-Dielectric Integrated Microlens Couplers for Wafer-Scale Packaging

Sirui Tang
Jianheng Luo
Johannes Henriksson
2026

Despite the widespread adoption of silicon photonics, fiber coupling remains a major challenge for large-scale manufacturing. Our group has previously demonstrated integrated microlens couplers (IMCs) as an efficient, broadband, and polarization-insensitive solution for wafer-scale fiber-to-chip coupling, achieving a free-space coupling loss as low as 0.6 dB.

In this project, we replace polymer-based IMCs with hard-material SiON microlenses formed by transferring the lens profile from photoresist (PR) to SiON using anisotropic etching. By optimizing the oxide-to-nitride ratio, we...

Sirui Tang

Graduate Student Researcher
Electrical Engineering and Computer Sciences
Professor Ming C. Wu (Advisor)
Ph.D. 2028 (Anticipated)
BSAC Fall 2025 Research Review Presenter

Daniel Klawson

Graduate Student Researcher
Electrical Engineering and Computer Sciences
Professor Ming C. Wu (Advisor)
Ph.D. 2025

Daniel graduated with honors from the University of Maryland, College Park in 2020 with a B.S. in electrical engineering. He is a first-year doctoral student in the Ming Wu Integrated Photonics lab researching photonic integrated circuits for scalable trapped ion quantum computers.

BSAC Spring 2023 Research Review Presenter

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BPNX1010: Foundry-Compatible Silicon Photonic MEMS Switch

Arkadev Roy
Daniel Klawson
Yiyang Zhi
Sirui Tang
Erik Anderson
2025

Integrated silicon photonic switches can serve as primary building blocks for low-latency, high-bandwidth interconnects for communication in data-intensive scenarios ranging from servers in datacenters to chiplets in multi-chip integrated packages. Our group has been developing MEMS-based large-scale silicon photonic switches which are particularly attractive for their low-loss, high-extinction, and low-power performance as well as sub-microsecond switching speed. Previous demonstrations, although fully compatible with CMOS foundries, relied upon a custom fabrication stack. The goal of the...

Arkadev Roy

Postdoctoral Researcher
Electrical Engineering and Computer Sciences
Professor Ming C. Wu (Advisor)
PostDoc 2023 to 2025

Arkadev Roy obtained his Ph.D. Degree in electrical engineering from California Institute of Technology in 2023. He completed his BTech degree in Electronic and Electrical communication engineering from the Indian Institute of Technology Kharagpur in 2018. Currently, he is a postdoc scholar at UC Berkeley and his work focuses on opto-electro-mechanical systems and heterogeneous integration.

BSAC Spring 2024 Research Review Presenter

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All-Dielectric Integrated Microlens Couplers for Wafer-Scale Packaging

Sirui Tang
2025
Fall 2025 BSAC Research Review Presentation View Presentation View Slides...

Johannes Henriksson

Graduate Student Researcher
Electrical Engineering and Computer Sciences
Professor Ming C. Wu (Advisor)
Ph.D. 2025

Johannes graduated from Lund University, Sweden, with a Masters degree in Engineering Physics which also included one year at UCLA as an exchange student. He has work experience from BorgWarner, ON Semiconductor and Lawrence Livermore National Laboratory and Apple. Johannes is currently pursuing his PhD degree in Electrical Engineering and Computer Science at UC Berkeley where he is working with Prof. Ming Wu on MEMS and silicon photonics.

Kyungmok Kwon

Alumni
Electrical Engineering and Computer Sciences
Professor Ming C. Wu (Advisor)
PostDoc 2021

Dr. Kyungmok Kwon graduated from KAIST, Korea, with a Ph.D degree in Electrical Engineering. His research area is silicon-photonics, nanophotonics, nanoengineering and nanomaterial. Kyungmok is currently a postdoctoral researcher in Electrical Engineering and Computer Science at UC Berkeley where he is working with Prof. Ming Wu on MEMS and silicon photonics.