Luke P. Lee (Advisor)

A Multi-Stage Micro-Tangential Flow Filtration System for BioMEMS Applications

Patrick Pak-Ho Leung
Dorian Liepmann
Luke P. Lee
Liwei Lin
2002

The micromachining technology that emerged in the 1980s has yielded an explosion of developments of micro electromeclianica1 systems (MEMS) in the past two decades. The developments have brought lives to many miniaturized sensors and...

A Large-Displacement Out-of-Plane SOI Actuator for Applications in Confocal Microscopy

Christopher Rulon Bowes-Lyon Ellis
Luke P. Lee
Roger T. Howe
2001

A silicon-on-insulator actuator has been designed for large DC deflections out of the plane of a wafer. The design employs deep reactive ion etching with a delay mask of two distinct silicon dioxide thicknesses to form silicon structures...

Microscale and Nanoscale Neural Interfaces

Karen Chihrnin Cheung
Luke P. Lee
Rajendra Bhatnagar
Yang Dan
Albert P. Pisano
2002
In order to mitigate the effccts of neurological disability, new neural interfaces are actively being developed. We present several new neural interfaces which can be used in both implantable and on-chip devices. ...

MEMS Based Micro-Capillary Pumped Loop for Chip-Level Temperature Control

Jeffrey Alan Kirshberg
Dorian Liepmann
Ralph Greif
Luke P. Lee
Kirk Yerkes
2000

Utilizing current Micro Electro Mechanical Systems (MEMS) technologies, a three-port micro-capillary pumped loop (micro-CPL) was designed, fabricated and tested to provide integral cooling to electronics or MEMS type devices. The two wafer design consists of...

Water-Powered Microfluidic Devices for Diagnostic and Drug Delivery Systems

Yu-Chuan Su
Liwei Lin
Albert P. Pisano
Luke P. Lee
2003
This dissertation presents the development of water-powered microfluidic devices, including actuators, pumps, pressure-sensitive valves, and flow discretizers, by integrating osmosis, capillarity, microfabrication, and polymer processing technologies at the microscale. By harvesting and coordinating the mechanical actuations driven by chemical potentials and interfacial forces, these water-powered devices can transport flows in pre-...

Electromagnetic Effects in MEMS Application: Actuators, Relay and Packaging

Andrew Cao
Liwei Lin
Albert P. Pisano
Luke P. Lee
2004
Two electromagnetic effects are utilized in MEMS applications: electromagnetic Lorentz force for bi-directional actuator/relay operations, and electromagnetic induction heating for MEMS bonding and packaging processes. As a proof-of-concept demonstration, a liquid-metal wetted contact process is developed to reduce the contact resistance in MEMS relay applications. Electromagnetic Lorenz force...

Silicon Processed Microstructures Using Self-Aligned Plastic Deformation

Jongbaeg Kim
Liwei Lin
Albert P. Pisano
Luke P. Lee
2004

Two self-aligend plastic deformation processes are devleoped to fabricate silicon microstructures, including angular vertical comb-drives, scanning micromirrors, variable capacitors, and two-axial actuators based on global-furnace and localized-Joule heating methods. As a proof-of-concept demonstration, an ultrasonic packaging procedure that generates local plastic deformation of metallic bonding materials is also established for MEMS packaging applications.

Plastic defomation of silicon occurs at elevated temperature when silicon is stresses to a level higher than the reduced yield...

An Integrated MEMS Syringe for Advanced Drug Delivery: Design, Fabrication and Fluid Mechanics of Suspension Flow through Microneedle Arrays

Boris Stoeber
Dorian Liepmann
Albert P. Pisano
Luke P. Lee
2002

New approaches for drug delivery seek to enable improved patient comfort as well as to provide an improved level of care. New approaches are especially important for drugs that cannot be administered orally. Liquid and lyophilized drugs can be delivered under the stratum corneum because of rapid diffusion of the drug into the capillary bed under the skin.

For this purpose, a syringe has been developed and fabricated using microfabrication to make an array of hollow, out-of-plane silicon needles using a combination of DRIE and isotropic etching. The needles have a typical height of...

Continuous Microfluidic Mixing Using Pulsatile Micropumps

Ajay Anil Deshmukh
Dorian Liepmann
Albert P. Pisano
Luke P. Lee
2001
Recent years have seen an explosion of interest in the field of microfluidics. Many possible applications exist for low cost, portable fluidic systems; examples include drug delivery devices, chemical reactors, and DNA sequencers. In many of these systems, the thorough mixing of small amounts of two or more fluids will be required. While it may at first seem that diffusion will be sufficient to quickly mix fluids in a sub-millimeter scale channel, this is often not the case. To meet this need, a new mixing process for...