Liwei Lin (Advisor)

Research Advised by Professor Liwei Lin

Lin Group:  List of Projects | List of Researchers

Silicon to Steel, Rapid Bonding

Theodore Prescop
Albert P. Pisano
Liwei Lin
2003

A rapid bonding process for installing vacuum-sealed MEMS strain sensor modules to mechanical components is being developed. This innovative process will be developed to replace conventional adhesive-based approaches. In particular, the silicon to ...

Sensing and Harvesting Pressure Fluctuations in Harsh Environments

Levent Beker
Liwei Lin
Albert P. Pisano
Tarek Zohdi
Rikky Muller
2017

Pressure is one of the most frequent and important parameters utilized in many applications to provide critical information about the operation of a system as well as a potential mechanical energy source. Among various pressure-related devices, very few function in harsh environment which includes high temperature, high pressure...

Resonant Circuits for MEMS Interfaces

Baris Cagdaser
Bernhard E. Boser
Kristofer S.J. Pister
Liwei Lin
Roger T. Howe
2005
This work describes the use of resonant circuits for electrostatic actuation of MEMS devices with low voltage drive electronics. Resonant drive also offers a solution for position sensing and generates a sense signal without the need for a separate sense capacitor. Moreover, an inherent force feedback mechanism limits the drive voltage as the drive capacitor becomes larger and stabilizes parallel-plate actuators beyond the pull-in point of the...

Poly-Crystalline Silicon Carbide Passivated Capacitive MEMS Strain Gauge for Harsh Environments

Babak Jamshidi
Albert P. Pisano
Liwei Lin
Kristofer S.J. Pister
2008
This dissertation describes the design and fabrication of a high-resolution capacitive sensor encapsulated in poly-crystalline silicon carbide. This sensor can continuously measure the strain in the substrate under aggressive environments such as extreme ambient temperature, corrosive media and high-g shocks. This strain sensor has a sub-millimeter gauge length capable of precise assessment of strain fields. The device...

Piezoelectric Aluminum Nitride RF Front-End Design for Wireless Communication

Yun-Ju Lai
Albert P. Pisano
Liwei Lin
2008
A micromachined radio frequency bandpass filter comprised by thin film piezoelectric aluminum nitride (AlN) lamb wave resonators for wireless communication channel selection has been developed, fabricated and tested. The AlN lamb wave resonator has a multilayered structure with aluminum interdigital transducer (IDT) on top and bottom of a c-oriented aluminum nitride thin film (Al/AlN/Al). The top and bottom IDTs can excite the lowest-order...

Rapid Synthesis of One-Dimensional Nanostructures via Induction Heating

Brian David Sosnowchik
Liwei Lin
Albert P. Pisano
Ming C. Wu
2008
This work presents the development of a platform technology for the rapid synthesis of a wide range of onedimensional nanostructures using induction heating. The technique is fast, enabling the synthesis of nanostructures in as short as one minute, simple, clean, and scalable. The technique is also versatile, enabling the synthesis of nanostructures in bulk or locally on MEMS, and may open up a new class of rapid nanostructure synthesis. The...

Optoelectronic Manipulation, Assembly, and Patterning of Nanoparticles

Arash Jamshidi
Ming C. Wu
Constance Chang-Hasnain
Liwei Lin
2009
The synthesis of nanostructures has advanced in the last decade to a point where a vast range of insulating, semiconducting, and metallic materials are available in a variety of forms and shapes such as wires, tubes, ribbons, sheets, and spheres. These nanostructures display exceptional physical properties that can be used to realize novel devices such as high-speed electronics, efficient photovoltaics and thermoelectrics, sensitive chemical and biological ...

Micro Chemical Vapor Deposition for the Synthesis of Nanomaterials

Qin Zhou
Liwei Lin
Albert P. Pisano
Ali Javey
2011

MEMS (Microelectromechanical Systems) technologies have enabled the construction of a micro chemical vapor deposition (μCVD) system for the synthesis of nanomaterials. By means of localized resistive heating via microheaters, unique capabilities of the μCVD systems have been utilized to synthesize carbon nanotubes and graphene in this work, including fast stabilization of temperature; rapid exchange of gas species; laminar gas flow due to small Reynolds number; small diffusion...

MEMS Aluminum Nitride Technology for Inertial Sensors

Gabriele Vigevani
Albert P. Pisano
Liwei Lin
Ming C. Wu
2011
The design and fabrication of MEMS Inertial Sensors (both accelerometers and gyro-scopes) made of Aluminum Nitride (AlN) is described in this dissertation. The goal of this work is to design and fabricate inertial sensors based on c-axis oriented AlN polycrystalline thin films. AlN is a post-CMOS compatible piezoelectric material widely used for acoustic resonators, such Bulk Acoustic Wave (BAW) and Lamb Wave Resonators(LWR). In this work we develop the design techniques necessary to obtain inertial sensors...

Micromachined Electrodes for High Performance Capacitive Pressure Sensors

Vikram Shenoy
Roger T. Howe
Liwei Lin
2000

This report discusses the use of silicon micromachining to create a part for subassembly into a high performance capacitive pressure sensor. The micromachined silicon part replaces traditionally machined metal parts. The micromachined parts provide tight control of the gap between the electrode ...