Liwei Lin (Advisor)

Research Advised by Professor Liwei Lin

Lin Group:  List of Projects | List of Researchers

Ring-shaped and Dual-electrode Bimorph Piezoelectric Micromachined Ultrasonic Transducers

Benjamin Eovino
Liwei Lin
Tsu-Jae King Liu
George C. Johnson
2018

The potential widespread usages of ultrasonic transducer technology have inspired the development of microelectromechanical systems (MEMS)-based devices. The research presented in this dissertation focuses on enhancing the performance of piezoelectric micromachined ultrasonic transducers (PMUTs) by devising innovative design structures, analytically deriving models to understand and optimize performance, and using these findings to demonstrate PMUT-based systems with increased capabilities. The ring-shaped PMUT is firstly introduced as a high-performance PMUT architecture, which is...

A 5-mm Untethered Crawling Robot via Self-Excited Electrostatic Vibration

Yangsheng Zhu
Mingjing Qi
Zhiwei Liu
Jianmei Huang
Dawei Huang
Xiaojun Yan
Liwei Lin
2021

The grand challenge toward the miniaturization of untethered robots is the lack of a proper actuation system that can effectively transform the limited onboard energy into an untethered movement of the whole body. Here, in this article, we present an insect scale, 5-mm-long, and 9.4 mg in body mass untethered crawling robot powered by a 37 mg onboard ceramic capacitor. With high electromechanical efficiency by utilizing self-excited electrostatic vibration, the prototype device can be directly powered by an onboard capacitor without any boost or frequency conversion circuitry, and...

A Pulsed Wave Doppler Ultrasound Blood Flowmeter by PMUTs

Hong Ding
Dengfei Yang
Mengjiao Qu
Chao Yang
Xuying Chen
Xianhao Le
Ke Zhu
Jinghui Xu
Liwei Lin
Jin Xie
2021

This letter describes a blood flowmeter by the pulsed wave Doppler (PWD) ultrasound detection procedure utilizing piezoelectric micromachined ultrasonic transducers (pMUTs) with the aluminum nitride (AlN) film as the piezoelectric material. The transceiver electronics for the PWD scheme is constructed for system control and signal processing, and a blood-mimicking fluid (BMF) is synthesized for flow velocity tests. Both the average Doppler frequency and Doppler power spectrum density (PSD) shift with respect to the flow velocity have been characterized and validated and the flow...

Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications

Zhichun Shao
Sedat Pala
Yande Peng
Liwei Lin
2021

This paper reports a bimorph pinned piezoelectric micromachined ultrasonic transducer (PMUT) for enhanced sound pressure output and electromechanical coupling factor for space imaging applications. An equivalent circuit model has been built to analyze the dynamic behavior of PMUTs and prototype devices have been designed, fabricated. Experimental results show a 58% measured increase in the electromechanical coupling factor and pulse-echo measurements show a 4-meter traveling distance in air under a 133 kHz driving frequency. As a demonstration example, a relatively long-distance (>1.5...

Bimorph Pinned Dual-Electrode Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) for Sensing and Actuation

Zhichun Shao
2021

Piezoelectric micromachined ultrasonic transducers (PMUTs) have advantages to those of traditional ultrasonic transducers in small form factor, low cost, low power consumption, large bandwidth, and good acoustic impedance matching. A bimorph pinned dual-electrode PMUT is developed for improved vibrational displacement, output sound pressure, and electro-mechanical coupling for several demonstration examples, including 3D space imaging, directional loudspeaker, and non-contact temperature sensing.


Analytically, an equivalent circuit model has been built for bimorph, pinned dual-...

Micro-Fabricated Shells for Mechanical and Fluidic Interconnects

Phillip Stupar
Albert P. Pisano
Liwei Lin
Luke P. Lee
2001
Three micro-fabricated shell processes are developed in this work, each tailored to a specific application. The first is a two-wafer molding process used to fabricate polysilicon shell suspensions that are very light and stiff. The second is a single crystal silicon...

Microfabricated Parylene Microneedles and Pneumatic/Hydraulic Actuators for Use in Interventional, Transvascular Drug Delivery

Kirk Seward
Albert P. Pisano
Kristofer S.J. Pister
Liwei Lin
2001
A method for performing interventional surgery has been developed. Transvascular delivery of therapeutic and diagnostic agents into perivascular space is desirable for various cardiovascular treatments and applications. The dosing of perivascular space requires the perpendicular actuation of a microneedle to slide through the layers...

Mu Chiao

Alumni
Mechanical Engineering
Professor Liwei Lin (Advisor)
Ph.D. 2002

Yu-Chuan Su

Alumni
Mechanical Engineering
Professor Liwei Lin (Advisor)
Ph.D. 2003

Kwok Siong Teh

Alumni
Mechanical Engineering
Professor Liwei Lin (Advisor)
Ph.D. 2004