Micro- and Nano-electromechanical Systems (MEMS and NEMS) consist of devices which can sense and actuate on the micrometer and nanometer scales. A number of MEMS devices have been commercialized, including accelerometers, gyroscopes, pressure sensors, and micromirror displays. The most common structural layer used in this technology is polycrystalline silicon, which is adequate for MEMS/NEMS devices operating in ambient environments; however, the use...

Read more about Silicon Carbide Thin Films via Low Pressure Chemical Vapor Deposition for Micro- and Nano-electromechanical Systems

Sebastien Payen

Alumni

Mechanical Engineering

Professor Albert P. Pisano (Advisor)

Ph.D. 2007

Read more about Sebastien Payen

Julian Lippmann

Alumni

Mechanical Engineering

Professor Albert P. Pisano (Advisor)

Ph.D. 2007

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Design and Fabrication of MEMS Resonant Strain Sensor in SOI

Julian Lippmann

Albert P. Pisano

Liwei Lin

Oliver M. O'Reilly

2004

The introduction of commercial foil-strain gauges in the 1950s revolutionized the study of structural and mechanical engineering, as well as material science. These sensors provide an unprecedented window into the fundamental behavior of materials and solids. Coupled with the advent of inexpensive computing power, strain gauges allow engineers to monitor the behavior of structures in the field easily. Refined over the years, the basic foil gauge now meets the demands of a vast array of...