Publications

We have successfully demonstrated three-dimensional (3D) ultrasound imaging via compressed sensing using piezoelectric micromachined ultrasonic transducers (pMUTs). This work reports the first experimental demonstration of compressed sensing with pMUTs, achieving 3D image reconstruction near the acoustic wavelength limit by only four receiving elements. Pseudo-random transmission signatures were encoded through frequency and delay modulation to enable high-fidelity reconstruction with a peak signal contrast of 28.7 dB. A 16-element lithium-niobate pMUT array operating at a resonant...

Acoustic transducers are essential for object localization and environmental sensing. Conventional transducers rely on piezoelectric crystals, whose acoustic-electric response is fixed by the crystal lattice's inherent asymmetry and orientation. This results in static coupling behavior, necessitating bulky arrays of rigid elements with complex wiring and high computational demands for directional sensing. Here, we report a fundamentally new class of acoustic-electric coupling that emerges from topology-governed charge transport in 3D micro-architected piezoelectric metamaterials. Unlike...

This paper presents the first implementation of 100- nm-wide nanofluidics in a 65-nm CMOS chip using a one- step wet-etch to remove the copper routing from the back- end-of-line (BEOL) while maintaining transistor integrity through continuous monitoring of the IDS-VGS characteristics. Vertical fluidics are also successfully demonstrated by etching through 360 nm × 360 nm-sized vias. A non-destructive laser microscopy technique for imaging fluidic channels at a dimension below the visible- light wavelength is developed.

Keywords: CMOS, subtractive nanofluidics, microfluidics, BEOL...

The evolution of superconducting quantum processors is driven by the need to reduce errors and scale for fault-tolerant computation. Reducing physical qubit error rates requires further advances in the microscopic modeling and control of decoherence mechanisms in superconducting qubits. Piezoelectric interactions contribute to decoherence by mediating energy exchange between microwave photons and acoustic phonons. Centrosymmetric materials like silicon and sapphire do not display piezoelectricity and are the preferred substrates for superconducting qubits. However, the broken...