BPN356: MEMS Microfabrication and Research Services at the Adriatic Research Institute

Adriatic Research Institute (ARI) is a California non-profit corporation in Berkeley, CA. Through membership in the Berkeley Microfabrication Laboratory Affiliates Program since 2001, we have enjoyed year-round access to the 4" and 6" CMOS and MEMS fabrication facility on campus. Our own research projects utilize a variety of SOI-based and other MEMS processes to fabricate fast two-axis micromirror scanners, ultra-light mirrors, low-stress membranes, nanowires, etc. ARI also has an extensively equipped electronics and MEMS design and test facility. All of these facilities, our experienced staff, and customized short-courses are available to the public on consulting or contract basis.

Project end date: 02/03/10