Liwei Lin (Advisor)

We present a novel systematic MEMS structure design approach based on a “deep conditional generative model”. Utilizing the conditional generative adversarial network (CGAN) on a case study of circular-shaped MEMS resonators, three major advancements have been demonstrated: 1) a high-throughput vectorized MEMS design generation scheme that satisfies the geometric constraints; 2) MEMS structural customization toward tunable, desired physical properties with excellent generation accuracy; and 3) experience-free design space explorations to achieve extreme physical properties, such as...

This paper reports a subcutaneous blood pressure (BP) monitoring system with AlN-based,piezoelectric micromachined ultrasonic transducers (PMUTs) on an ambulatory sheep. Comparedto the state-of-art, three distinctive achievements have been demonstrated: (1) precision andcontinuous measurements of the blood pressure from the diameter changes of blood vessels assmall as 2.3 μm by means of ultrasonic detections; (2) experimental validations in both in vitroartery models and an acute animal study; and (3) the ...

A variety of autonomous oscillations in nature such as heartbeats and some biochemical reactions have been widely studied and utilized for applications in the fields of bioscience and engineering. Here, we report a unique phenomenon of moisture-induced electrical potential oscillations on polymers, poly([2-(methacryloyloxy)ethyl] dimethyl-(3-sulfopropyl) ammonium hydroxide-co-acrylic acid), during the diffusion of water molecules. Chemical reactions are modelled by kinetic simulations while system dynamic equations and the stability matrix are analyzed to show the chaotic nature of...