Kristofer S.J. Pister (Advisor)

Research Advised by Professor Kristofer S.J. Pister

Ezekiel Kruglick

Alumni
Electrical Engineering and Computer Sciences
Professor Kristofer S.J. Pister (Advisor)
Ph.D. 1999

Microrelay Design, Performance, and Systems

Ezekiel Kruglick
Kristofer S.J. Pister
Roger T. Howe
Richard M. White
Dorian Liepmann
1999

Surface micromachined four terminal relays have been fabricated, tested, and packaged. The relays are implemented in a foundry process with minimal post-processing. They show on resistances as low as 20mW, current carrying capacities as highas 0.48 Amps, and lifetimes in the millions of cycles while hot switching 80mA. These devices are thus competitive with commercial macroscopic relays.

Achieving these high performance and reliability levels required exploring the physics and tribology of microrelays and using novel physical experiments to outline a...

Richard Yeh

Alumni
Electrical Engineering and Computer Sciences
Professor Kristofer S.J. Pister (Advisor)
Ph.D. 2001

Microfabricated Parylene Microneedles and Pneumatic/Hydraulic Actuators for Use in Interventional, Transvascular Drug Delivery

Kirk Seward
Albert P. Pisano
Kristofer S.J. Pister
Liwei Lin
2001
A method for performing interventional surgery has been developed. Transvascular delivery of therapeutic and diagnostic agents into perivascular space is desirable for various cardiovascular treatments and applications. The dosing of perivascular space requires the perpendicular actuation of a microneedle to slide through the layers...

Mechanical Analysis and Design of Vibratory Micromachined Gyroscopes

Wyatt Davis
Albert P. Pisano
Oliver M. O'Reilly
Kristofer S.J. Pister
2001
Vibratory micromachined gyroscopes typically exhibit certain undesirable behaviors that impede the angular rate measurement, such as nonlinearity, cross-axis sensitivity, scale factor offset, and quadrature error. These errors have sources in both the mechanical and electrical ...

Design and Modeling of a Dual Mass SOI-MEMS Gyroscope

Ashwin Seshia
Roger T. Howe
Kristofer S.J. Pister
1999

This report discusses the design of a dual mass silicon-on-insulator(SOI) MEMS gyroscope. The main advantage of the dual mass gyroscope is the ability to cancel out common mode acceleration. The SOI MEMS process also provides several inherent advantages including increased out-of-plane stiffness, increased mass, and increased...

Integrated Micromechanical Resonant Sensors for Inertial Measurement Systems

Ashwin Seshia
Roger T. Howe
Bernhard E. Boser
Kristofer S.J. Pister
Roberto Horowitz
2002
Thumbnail-sized inertial measurement systems based on Micro Electro Mechanical Systems (MEMS) technology have been perceived as a breakthrough in the field of inertial navigation. However, even as micromechanical accelerometers have seen widespread commercialization, vibratory micromechanical gyroscopes...

Assembly and Molding Processes for Three-Dimensional Microfabrication

Elliot Hui
Roger T. Howe
Kristofer S.J. Pister
Dorian Liepmann
2002
Lithographic semiconductor microfabrication has been employed with great success for the manufacture of mechanical structures, achieving microscopic dimensions and great complexity at low cost. However, due to the inherently planar nature of the lithographic process, this technology is limited in its capability to produce three-dimensional structures. In this work, three strategies are presented for extending thin-film microfabrication into the...

Micromachined Mirrors

Robert Conant
Richard S. Muller
Kristofer S. J. Pister
Liwei Lin
2002

This dissertation discusses the fundamental limits of scanning mirror design, focusing on the limitations due to the interaction between mechanical properties (mirror flatness and dynamic deformation), and optical properties (beam divergence and optical resolution). The performance criteria for both resonant-scanning mirrors and steady-state, beam-positioning mirrors are related to the mirror geometries, desired optical resolution, material properties, and mechanical resonant frequencies. The optical resolution of the scanning mirror is linearly dependent on the mirror length, so longer...

Ultra-Low Energy Architectures and Circuits for Cubic Millimeter Distributed Wireless Sensor Networks

Brett Warneke
Kristofer S.J. Pister
Jan M. Rabaey
Paul K. Wright
2003
This dissertation demonstrates that it is possible to build a useful and complex sensor and communication platform in the cubic millimeter scale using optimizations at the circuit, computer architecture, component, and system-levels to contribute toward this goal. The exponential size and power reductions in computation, communication, and sensing in recent years allows the integration of an autonomous wireless sensor node into volumes less than 16 mm^3. System architectures for...