Clark T.-C. Nguyen (Advisor)

Research Advised by Professor Clark T.-C. Nguyen

Nguyen Group: List of Projects | List of Researchers

FEA-Assisted Analysis and Gain Optimization of a Micromechanical Resonant Displacement Amplifier

Gleb Melnikov

Clark T.-C. Nguyen

Kristofer S.J. Pister

2017

Micromechanical resonant switches have the potential to greatly outperform currently dominant semiconductor switches due to their higher figures of merit. Of the current designs available, resonant MEMS switches are among the most promising, as they can achieve very large amplitudes at resonance with greatly reduced actuation voltages compared to more conventional MEMS switches, such as those that rely on pull-in based actuation.

Such resonant micromechanical devices are currently in their infancy, and require additional optimization and analysis to resolve their...

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Finite Element Analysis of the Effects of Package Induced Stress on Micromechanical Resonator Temperature Stability

Divya Kashyap

Clark T.-C. Nguyen

Liwei Lin

2015

Vacuum encapsulation of RF disk and beam resonators is often needed to maintain high quality factor and frequency stability. Conventionally, this is performed at the wafer level by anodic, eutectic, fusion, or glass frit bonding. After wafer dicing, packaging proceeds with die attach to the package substrate and plastic over molding. This process leads to many contacts between materials of different coefficients of thermal expansion (CTE) resulting in package-induced stress. The focus of this work is to determine the effect of this stress on the temperature stability of...