Bernhard Boser (Advisor)

BPN593: Design and Modeling of Liquid Bearing Electrostatic Micromotor

Zhaoyi Kang

This project aims to design and develop an actuation system based on liquid bearing micro-rotary stage (micro-motor). The liquid bearing is essentially a small volume of fluid confined between the rotor and stator through Teflon surface coatings, which is capable of supporting both static and shock loads with reduced mechanical vibrations. The rotor is actuated by the three-phase electrostatic torque between the rotor and stator electrodes. We will develop analytical and numerical model to analyze and optimize the stationary and transient rotary of the micro-motor. Another major task...

BPN604: Readout Circuits for AlN Resonant Sensors

Igor I. Izyumin

Resonant MEMS sensors are commonly used for sensing pressure, mass, force, strain, and acceleration. Resonant readout is particularly attractive for piezoelectric sensors, since it is the only method that allows measurement of static or slowly-varying quantities. Fundamentally, resonant readout relies on a fixed dependence between the quantity to be measured and the resonant frequency of a mechanical structure. However, the resonant frequency is generally also a strong function of several unwanted variables, including temperature, fabrication variability, and packaging stress. One...

BPN475: A CMOS Magnetic Sensor Chip for Biomedical Assay

Karl Skucha

This project aims to develop a compact CMOS biosensor for robust detection of micron-sized paramagnetic beads which are used as labels for target analyte in biomedical applications.No external magnet, reference sensors or calibration is required. A 4.5-um bead is detected in 16 ms with probability of detection error < 0.1%. The ultimate goal of this project is to integrate the CMOS sensor chip with micro-fluidic system and demonstrate a lab-on-a-chip platform.

Project end date: 08/16/12

BPN555: Power Transfer Over a Capacitive Interface

Mitchell H. Kline
Igor I. Izyumin

The simplicity and low cost of capacitive interfaces makes them very attractive for wireless charging stations. Major benefits include low electromagnetic radiation and the amenability of combined power and data transfer over the same interface. We present a capacitive power transfer circuit using series resonance that enables efficient high frequency, moderate voltage operation through soft-switching. An included analysis predicts fundamental limitations on the maximum achievable efficiency for a given amount of coupling capacitance and is used to find the optimum circuit component...

BPN612: High-Throughput CMOS Detector for Magnetic Immunoassays

Simone Gambini

The goal of this project is to design an electronic system capable of detecting the presence of < 2.8um magnetic beads over a biologically relevant number of sensing sites in less than 10 seconds, giving an over 10X improvement in measurement time over prior art. We use a combination of signal processing and low-noise circuit design techniques to obtain this goal.

Project end date: 08/17/12

BPN485: Ultrasonic Gesture Recognition on a Chip

Richard J. Przybyla
Hao-Yen Tang

Optical 3D imagers for gesture recognition, such as Microsoft Kinect, suffer from large size and high power consumption. Their performance depends on ambient illumination and they generally cannot operate in sunlight. These factors have prevented widespread adoption of gesture interfaces in energy- and volume-limited environments such as tablets and smartphones. Gesture recognition using sound is an attractive candidate to overcome these difficulties because of the potential for chip-scale solution size, low power consumption, and ambient light insensitivity. Our research focuses on...

BPN678: MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI)

Niels Quack
Behnam Behroozpour
Sangyoon Han
Phillip Sandborn

Active III-V photonic components and passive Si photonic circuits are integrated with CMOS electronic circuits in this project. The modular MEMS-Electronic-Photonic Heterogeneous Integration (MEPHI) platform will make use of the high performance of the individual components and integrate (1) MEMS tunable VCSEL with high-index-contrast grating (HCG) mirrors, (2) photodetectors, (3) Si photonic waveguides, couplers, and interferometers, (4) high-efficiency vertical optical coupler between III-V and Si waveguides, and (5) CMOS circuits for frequency control and temperature compensation...

BPN741: Programmable Gyroscope Test Platform

Oleg I. Izyumin

This project aims to develop a compact and self-contained universal test platform for DSP-based control of MEMS gyroscopes and resonant sensors. Many operating modes require features not available in off-the-shelf laboratory instruments, and it is difficult to perform sensor testing and validation with laboratory test equipment due to size and power constraints. We have implemented a multi- channel digital lock-in amplifier in FPGA hardware, providing PLLs, modulators, demodulators, filters, and the capability to add custom functionality. Software-based baseband DSP allows...

BPN649: Magnetic Particle Flow Cytometer

Pramod Murali

Circulating tumor cells can be found in peripheral blood in cancer patients and their number correlates to the stage of cancer. Currently, fluorescent markers are used to tag the cancerous cells to count them with a flow cytometer which requires multiple sample preparation steps such as centrifugation, erythrocyte lysis, etc. The use of magnetic microparticle labels instead can significantly simplify sample preparation and can enable point-of- care diagnostic devices to detect cancerous cells. We have demonstrated an integrated prototype which includes a CMOS chip, microfluidics, and...

BPN722: 3D Ultrasonic Fingerprint Sensor On a Chip Using Piezoelectric Micromachined Ultrasonic Transducers (PMUT)

Joshua Kay
Joy Jiang

We've successfully built a 500dpi, 4.75mm x 3.5mm monolithic ultrasonic fingerprint sensor on a chip with PMUT and integrated CMOS process that solves the problem of capacitive fingerprint sensors. The sensor is resilient to common contamination such as dirt, sweat, and oil by penetrating through them, and the sensor has the capability of capturing inner-finger feature such as dermis fingerprint. The capability of generating a three- dimensional, volumetric image of the finger surface and the tissues beneath the finger surface makes it extremely difficult to deceive the sensor with...