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Title Author Year Publication type
Design and User Guide for the Single Chip Mote Digital System Sahar Mesri; Kristofer S.J. Pister; Ali M. Niknejad 2016 Master's Thesis
Magnetic Microactuators with Polysilicon Flexures Jack William Judy; Richard S. Muller; Seth Sanders 1994 Master's Thesis
Microresonators as Vacuum Gauges Sharon Oh; Roger T. Howe; Liwei Lin 2001 Master's Thesis
Design and Characterization of a MEMS Piezoelectric Bi-Chevron Actuator Michael S. Sheppy; Albert P. Pisano; David M. Auslander 2009 Master's Thesis
Sputter Deposition of Piezoelectric Lead Zirconate Titanate Thin Films for Use in MEMS Sensors and Actuators Clifford Frederick Knollenberg; Timothy D. Sands; Richard M. White; Eugene, E. Haller 2001 Master's Thesis

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