Publications

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Title Author Year Publication type
Xenon Difluoride Etching of Silicon for MEMS Floy I-Jung Chang; Kristofer S.J. Pister 1995 Master's Thesis
The Damping Mechanism in Single-Ended Tuning Fork Resonant Structures Gonnan K. Leung; Roger T. Howe 1995 Master's Thesis
A Micro-Electro-Mechanical Systems (MEMS) Device to Measure the Fracture Strain of Polycrystalline Silicon Peter Truxtun Jones; Roger T. Howe 1995 Master's Thesis
Surface Micromachined Resonant Force Transducers Trey Roessig; Albert P. Pisano; George C. Johnson; Lisa Pruitt 1995 Master's Thesis
Thermally-Driven Angular Rate Sensors in Standard CMOS Michael Dean Pottenger 1995 Master's Thesis

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