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| Title | Author | Year | Publication type |
|---|---|---|---|
| Xenon Difluoride Etching of Silicon for MEMS | Floy I-Jung Chang; Kristofer S.J. Pister | 1995 | Master's Thesis |
| Zero-Change Foundry Compatible Silicon Photonics MEMS Optical Switch | Arkadev Roy; Daniel Klawson; Jianheng Luo; Erik Anderson; Yiyang Zhi; Sirui Tang; Ming C. Wu | 2025 | Conference Paper (Proceedings) |
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