Technical Reports

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Modularly Integrated MEMS Technology

Marie-Ange Eyoum; Tsu-Jae King; Roger T. Howe; Sanjay Govindje
Ph.D. Dissertation, 2006

Microfluidic Technologies for Single Cell Analysis

Dino Di Carlo; Luke P. Lee; Jay T. Groves; Tejal A. Desai
Ph.D. Dissertation, 2006

Fabrication and Assembly of a 2.4mm Compressed Gas Rotary Expander

Jose Rosario-Rosario; Albert P. Pisano; Dorian Liepmann
Master's Thesis, 2005

Characterization of Low-Fluence Excimer Laser Annealing of AlN Thin Films

David Park; Albert P. Pisano
Master's Thesis, 2005

Massively Parallel Optical Manipulation of Single Cells, Micro- and Nano-particles on Optoelectronic Devices

Pei-Yu Chiou; Ming C. Wu; Connie J. Chang-Hasnain; Luke P. Lee
Ph.D. Dissertation, 2005

Electronics for Resonant Sensors

Kenneth Wojciechowski; Bernhard E. Boser; Liwei Lin; Roger T. Howe
Ph.D. Dissertation, 2005

Piezoelectric Aluminum Nitride Vibrating RF MEMS for Radio Front-End Technology

Gianluca Piazza; Albert P. Pisano; Roger T. Howe; Liwei Lin; Kristofer S.J. Pister
Ph.D. Dissertation, 2005

Localized Synthesis, Assembly and Integration of Silicon Nanowires

Ongi Englander; Liwei Lin; Albert P. Pisano; Oscar D. Dubon
Ph.D. Dissertation, 2005

Pick and Place Silicon on Insulator Microassembly

Matthew Last; Kristofer S.J. Pister; Ming C. Wu; Liwei Lin
Ph.D. Dissertation, 2005

Electro Micro-Metrology

Jason Clark; Kristofer S. J. Pister; James Demmel; Sanjay Govindje; Luke P. Lee
Ph.D. Dissertation, 2005

Optimized Fabrication of Ultra-Deep Reactive Ion Etched Silicon Components for the MEMS Rotary Engine Power System

Fabian Martinez; Albert P. Pisano; A. Carlos Fernandez-Pello; Seth Sanders
Ph.D. Dissertation, 2005

Localized Synthesis, Assembly and Application of Carbon Nanotubes

Dane Christensen; Liwei Lin; Albert P. Pisano; Alexander Zettl
Ph.D. Dissertation, 2005

Liquid Fuel Injection System for Mini-Scale Rotary Engines

Sang-Won Park; Albert P. Pisano; A. Carlos Fernandez-Pello
Master's Thesis, 2005

Resonant Circuits for MEMS Interfaces

Baris Cagdaser; Bernhard E. Boser; Kristofer S.J. Pister; Liwei Lin; Roger T. Howe
Ph.D. Dissertation, 2005

Fabrication and Assembly of A 2.4mm Compressed Gas Rotary Expander

Jose Rosario-Rosario; Albert P. Pisano; Dorian Liepmann
Ph.D. Dissertation, 2005

Electromagnetic Generators for Portable Power Applications

Matthew Kurt Senesky; Seth R. Sanders; Albert P. Pisano; Dennis K. Lieu
Ph.D. Dissertation, 2005

MEMS Microbial Fuel Cells and Photosynthetic Electrochemical Cells

Kien-Bang Lam; Liwei Lin; Albert P. Pisano; Kevin E. Healy
Ph.D. Dissertation, 2005

Feasibility Study of a Viscous Rotary Engine Power System

Thomas Cauley; Albert P. Pisano; Dennis K. Lau
Master's Thesis, 2005

Ultra-Low Power Wireless Technologies for Sensor Networks

Brian Otis; Jan Rabaey; Roger T. Howe
Ph.D. Dissertation, 2005

Gimballed Electrostatic Microactuators with Embedded Interconnects

Lilac Muller; Albert P. Pisano; Roger T. Howe; Kristofer S.J. Pister
Ph.D. Dissertation, 2005

Electrostatic Transduction for MEMS Resonators

Sunil Bhave; Roger T. Howe; Tsu-Jae King; Oliver M. O’Reilly
Ph.D. Dissertation, 2005

Electromagnetic Effects in MEMS Application: Actuators, Relay and Packaging

Andrew Cao; Liwei Lin; Albert P. Pisano; Luke P. Lee
Ph.D. Dissertation, 2004

Design and Evaluation of a MEMS Offset Capacitive Comb Strain Sensor

Robert Azevedo; Albert P. Pisano; Oliver M. O’Reilly
Master's Thesis, 2004

Low-Power Portable Microfluidic Delivery System

Eric Hobbs; Albert P. Pisano; Liwei Lin; Daniel Fletcher
Ph.D. Dissertation, 2004

Planar Microfluidic Devices for Control of Pressure-Driven Flow

Jeremy Frank; Albert. P. Pisano; Liwei Lin; Daniel Fletcher
Ph.D. Dissertation, 2004

Microfluid Integrated Nano-Scale Biological Cell Probes

Jesse Herrick; Albert P. Pisano; Luke P. Lee; Lydia L. Sohn
Master's Thesis, 2004

Fabrication Of Ultra Thick Ferromagnetic Structures In Silicon

Debbie G. Jones; Albert P. Pisano; Seth Sanders
Master's Thesis, 2004

CMOS Imaging Receivers for Free-Space Optical Communication

Brian Leibowitz; Kristofer S. J. Pister; Bernhard E. Boser; Andrew Packard
Ph.D. Dissertation, 2004

Evolutionary Synthesis of MEMS

Raffi Kamalian; Alice M. Agogino; Albert P. Pisano; Kristofer S.J. Pister
Ph.D. Dissertation, 2004

Lab-on-a-Chip Mechanical and Optical Components

Nikolas Chronis; Luke P. Lee; Lisa Pruitt; Albert P. Pisano; Richard S. Muller
Ph.D. Dissertation, 2004

Optical MEMS for Free-Space Communication

Lixia Zhou; Kristofer S.J. Pister; Joseph M. Kahn; Roger T. Howe; Alice M. Agogino
Ph.D. Dissertation, 2004

Excimer Laser Annealing of Silicon Germanium for MEMS Applications

Carrie W. Low; Roger T. Howe; Tsu-Jae King
Master's Thesis, 2004

Silicon Processed Microstructures Using Self-Aligned Plastic Deformation

Jongbaeg Kim; Liwei Lin; Albert P. Pisano; Luke P. Lee
Ph.D. Dissertation, 2004

Energy Measures for Sensor Networks

Lance Doherty; Kristofer S.J. Pister; Kannan Ramchandran; Ming Gu
Ph.D. Dissertation, 2004

Incremental Network Programming for Wireless Sensors

Jaein Jeong; Kristofer S.J. Pister; David E. Culler
Master's Thesis, 2004

Tunable Inductive Microelectromechanical Devices Actuated by Linear Vibromotor and the Reliability of Microchannels

Wen-Pin Shih; Norman C. Tien
Ph.D. Dissertation, 2004

High-Order ΣΔ Interface for Micromachined Inertial Sensors

Vladimir Petkov; Bernhard E. Boser; Roger T. Howe; Roberto Horowitz
Ph.D. Dissertation, 2004

CotsBots: An Off-the-Shelf Platform for Distributed Robotics

Sarah Bergbreiter; Kristofer S.J. Pister; David Culler
Master's Thesis, 2004

Lateral Etching of Silicon: The Hole-in-the-Wall Fabrication Processes

Jeremy Frank; Albert P. Pisano; Liwei Lin; Lydia L. Sohn
Master's Thesis, 2004

Design and Fabrication of MEMS Resonant Strain Sensor in SOI

Julian Lippmann; Albert P. Pisano; Liwei Lin; Oliver M. O'Reilly
Master's Thesis, 2004

Ultra High Frequency Piezoelectric Resonators: Suspension and Elastic Coupling

James Porter; Albert P. Pisano; Roger T. Howe; Liwei Lin
Master's Thesis, 2004

The Design of Low Phase Noise MEMS Oscillators for Frequency References

Manu Seth; Bernhard E. Boser; Roger T. Howe
Master's Thesis, 2004

Liquid to Vapor Phase Change in Constant Cross-Section Silicon Microchannels

Brenda Haendler; Albert P. Pisano; Dorian Liepmann; Kristofer S.J. Pister
Master's Thesis, 2003

Electrical Interconnect of Components Transferred by Fluidic Microassembly Using Capillary Forces

Karen Scott; Roger T. Howe; Clayton J. Radke; John S. Smith
Ph.D. Dissertation, 2003

Ultra-Deep Reactive Ion Etching for Silicon Wankel Internal Combustion Engines

Aaron Knobloch; Albert P. Pisano; Carlos Fernandez-Pello; Seth Sanders
Ph.D. Dissertation, 2003

Polycrystalline Silicon-Germanium Contact Resistance Study for Integrated MEMS Technology

Marie-Ange Eyoum; Tsu-Jae King; Roger T. Howe
Master's Thesis, 2003

Ultra-Low Energy Architectures and Circuits for Cubic Millimeter Distributed Wireless Sensor Networks

Brett Warneke; Kristofer S.J. Pister; Jan M. Rabaey; Paul K. Wright
Ph.D. Dissertation, 2003

Apex Seal Design for the Mems Rotary Engine Power System

Fabian Martinez; Albert P. Pisano; Carlos Fernandez-Pello
Master's Thesis, 2003

Microfluidic Accumulator Driven by Capillary Forces

Eric Hobbs; Albert P. Pisano; Liwei Lin; Roya Maboudian
Master's Thesis, 2003

Capacitive Position-Sensing Interface for Micromachined Inertial Sensors

Xuesong Jiang; Bernhard E. Boser; Roger T. Howe; Roberto Horowitz
Ph.D. Dissertation, 2003