Title |
Author | Year | Publication type |
|---|---|---|---|
| 2-DOF Actuated Micromirror Designed for Large DC Deflection | Mathew Last; Kristofer S.J. Pister | 1999 | Conference Paper (Proceedings) |
| 199-MHz Polysilicon Micromechanical Disk Array-Composite Oscillator | Qianyi Xie; Sherwin A. Afshar; Alper Ozgurluk; Clark T.-C. Nguyen | 2020 | Conference Paper (Proceedings) |
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