|
Integrated-Circuit-Compatible Electret and Condenser Ultrasonic Transducers |
Jonathan Bernstein; Richard M. White |
1983 |
Ph.D. Dissertation |
|
Integrated Silicon Electromechanical Vapor Sensor |
Roger T. Howe; Richard S. Muller; Richard M. White |
1984 |
Ph.D. Dissertation |
|
Pyroelectric ZnO Integrated Sensors |
Dennis L. Polla; Richard S. Muller; Richard M. White |
1985 |
Master's Thesis |
|
Design, Theory, and Applications of Integrable Carrier-Domain Magnetometers |
Juan Goicolea; Richard S. Muller |
1986 |
Ph.D. Dissertation |
|
A Tactile Sensor Utilizing Light Coupling Between Optical Fibers |
Vadim Konradi |
1987 |
Master's Thesis |
|
Low Temperature Silicon-Silicon Bonding with Oxides |
Leslie A. Field; Richard S. Muller |
1988 |
Master's Thesis |
|
Reactive Ion Etching of Zinc Oxide and Indium-Tin-Oxide |
Eric Minami; Richard M. White; Roger T. Howe |
1988 |
Master's Thesis |
|
Analysis and Characterization of the Vertical Carrier Domain Magnetometer |
Bret S. Burns; Richard S. Muller; Roger T. Howe |
1989 |
Master's Thesis |
|
IC-Processed Polysilicon Micromechanics: Technology, Material, and Devices |
Yu-Chong Tai; Richard S. Muller; Roger T. Howe |
1989 |
Ph.D. Dissertation |
|
Integrated Micromachinery -- Moving Structures on Silicon Chips |
Long-Sheng Fan; Richard S. Muller |
1990 |
Ph.D. Dissertation |
|
Formation, Properties, and Applications of Porous Silicon |
Rolfe Anderson; Richard S. Muller |
1990 |
Ph.D. Dissertation |
|
Polysilicon Microstructures to Characterize State Friction |
Martin Lim; Roger T. Howe; Roberto Horowitz |
1990 |
Master's Thesis |
|
Integrated Microphone with CMOS Circuits on a Single Chip |
Eun Sok Kim; Richard S. Muller |
1990 |
Ph.D. Dissertation |
|
Electrostatic Comb Drive for Resonant Sensor and Actuator Applications |
William C.-K. Tang; Roger T. Howe |
1990 |
Master's Thesis |
|
Thermal Applications of Microbridges |
Carlos Mastrangelo; Richard S. Muller |
1990 |
Ph.D. Dissertation |
|
Design, Fabrication, and Optimization of Micromechanical Flexures |
Young-Ho Cho; Albert P. Pisano; Roger T. Howe |
1990 |
Ph.D. Dissertation |
|
Micromechanical Electrostatic Voltmeter |
Charles Heng-Yuan Hsu; Richard S. Muller; Roger T. Howe |
1991 |
Master's Thesis |
|
Electromechanical Characterization of Microresonators for Circuit Applications |
Clark T.-C. Nguyen; Roger T. Howe |
1991 |
Master's Thesis |
|
Miniature Gaseous Light Sources |
Hsi-Jen Yeh; Richard S. Muller; Roger T. Howe |
1991 |
Master's Thesis |
|
Growth Stresses in Undoped LPCVD Polycrystalline Silicon Films |
Peter Krulevitch |
1991 |
Master's Thesis |
|
The Motion of a Pointer Tip Driven by Two Linked Electrostatic Comb Drives |
Ronald Fox |
1991 |
Master's Thesis |
|
Silicon Electromechanical Microgrippers: Design, Fabrication, and Testing |
Chang-Jin Kim; Albert P. Pisano; Richard S. Muller |
1991 |
Ph.D. Dissertation |
|
Microstructure Micropackaging |
Kristen M. McNair; Roger T. Howe; Richard M. White |
1991 |
Master's Thesis |
|
Fluid-Actuated Micromachined Rotors and Gears |
Leslie A. Field; Richard M. White |
1991 |
Ph.D. Dissertation |
|
The Optimal Kinematic Synthesis of Planar, Full Cycle, Constant-Velocity, Straight-Line Mechanisms |
Peter Hall Hodges; Albert P. Pisano |
1991 |
Ph.D. Dissertation |
|
Applications of Ultrasonic Lamb Waves |
Stuart Wenzel; Richard M. White |
1992 |
Ph.D. Dissertation |
|
Impact Actuation of Polysilicon Micromechanical Structures |
Abraham Lee; Albert P. Pisano; Roger T. Howe |
1992 |
Ph.D. Dissertation |
|
Fabrication of Exposed Gate Field Effect Transistors for Sensor Applications |
Albert William Flounders; Dennis W. Hess |
1992 |
Ph.D. Dissertation |
|
A Curved Teeth Flexible Comb Drive for Electrostatic Microgrippers |
Ken Chow |
1992 |
Master's Thesis |
|
Hinged Polysilicon Structures with Integrated CMOS Thin Film Transistors |
Kristofer S.J. Pister; Roger T. Howe |
1992 |
Ph.D. Dissertation |
|
A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry |
Weijie Yun; Roger T. Howe |
1992 |
Ph.D. Dissertation |
|
High-Senstivity Micromechanical Electrostatic Voltmeter |
David Loconto; Richard S. Muller; Roger T. Howe |
1992 |
Master's Thesis |
|
Controlled Structure Release for Silicon Surface Micromachining |
David Monk; David S. Soane; Roger T. Howe; David B. Graves |
1993 |
Ph.D. Dissertation |
|
Selective Encapsulations of MEMS: Micro Channels, Needles, Resonators and Electromechanical Filters |
Liwei Lin; Albert P. Pisano; Roger T. Howe; Van P. Carey |
1993 |
Ph.D. Dissertation |
|
Large Displacement Electrostatic Microactuators With Polysilicon Flexure Suspensions |
Reid Alyn Brennen; Albert P. Pisano; Roger T. Howe; Homayoon Kazerooni |
1993 |
Ph.D. Dissertation |
|
Gel-coated FPW Biosensors |
Amy Wang; Richard M. White |
1993 |
Master's Thesis |
|
Biochemical Microflow System / Microfabricated Optical Chopper |
Michael T. Ching; Richard M. White; Albert P. Pisano |
1993 |
Master's Thesis |
|
Modulated Infrared Source |
Peter Yung-Sen Chen; Richard S. Muller; Roger T. Howe |
1993 |
Master's Thesis |
|
Piezoresistive Sensing in Micromechanical Resonators |
Yorgen H. Anderson; Richard S. Muller; Richard M. White |
1993 |
Master's Thesis |
|
Micromechanical Investigations of Silicon and Ni-Ti-Cu Thin Films |
Peter Krulevitch; George C. Johnson; Roger T. Howe; Kyriakos Kornvopoulos |
1994 |
Ph.D. Dissertation |
|
Micromechanisms Using Sidewall Beams |
Michael Judy; Roger T. Howe |
1994 |
Ph.D. Dissertation |
|
SPICE Analysis of a Micro Gyro and Mixed Analog-Digital Sensor Interface Circuit |
Amit Burstein; Chand R. Viswanathan; Kristofer S.J. Pister; William H. Kaiser |
1994 |
Master's Thesis |
|
Design and Analysis of Closed-loop Controlled Parallel-Plate Electrostatic MicroGrippers |
Patrick Breckow Chu; Kristofer S.J. Pister |
1994 |
Master's Thesis |
|
Micromachined Piezoelectric Microphones |
Robert P. Ried; Richard S. Muller |
1994 |
Ph.D. Dissertation |
|
Magnetic Microactuators with Polysilicon Flexures |
Jack William Judy; Richard S. Muller; Seth Sanders |
1994 |
Master's Thesis |
|
A Silicon-Based Microsensor to Measure Airborne Contaminants |
Bharat M. Shah; Richard M. White; Albert P. Pisano |
1994 |
Master's Thesis |
|
Simulation of Microelectromechanical Systems |
Gary Fedder; Roger T. Howe |
1994 |
Ph.D. Dissertation |
|
Design and Implementation of Sigma-Delta Force-Balance Microaccelerometers |
Crist Lu; Bernhard E. Boser; Roger T. Howe |
1994 |
Master's Thesis |
|
Micromechanical Signal Processors |
Clark T.-C. Nguyen; Roger T. Howe |
1994 |
Ph.D. Dissertation |
|
Ultrasonic Microtransport |
Richard M. Moroney III; Richard M. White |
1995 |
Ph.D. Dissertation |
