Abstract:
We demonstrate broadband silicon photonics MEMS switch with more than 30 dB extinction ratio using a zero-change foundry compatible process and BEOL post-processing. © 2025 The Author(s)
Keywords: {Microelectromechanical systems;Optical switches;Microswitches;Lasers and electrooptics;Silicon photonics;Extinction ratio;Foundries;Broadband communication;Electro-optical waveguides}
Publication date:
October 14, 2025
Publication type:
Conference Paper (Proceedings)
Citation:
"A. Roy et al., ""Zero-Change Foundry Compatible Silicon Photonics MEMS Optical Switch,"" 2025 Conference on Lasers and Electro-Optics (CLEO), Long Beach, CA, USA, 2025, pp. 1-2. keywords: {Microelectromechanical systems;Optical switches;Microswitches;Lasers and electrooptics;Silicon photonics;Extinction ratio;Foundries;Broadband communication;Electro-optical waveguides}