Liwei Lin (Advisor)

Sensing, actuation and imaging applications based on ultrasounds could expand to many applications by means of miniaturization and low power consumption via MEMS fabrication technologies. Piezoelectric micromachined ultrasound transducers (PMUTs) with thin film designs have emerged as key commercial products but current state-of-art PMUTs are limited by the acoustic power/pressure for applications within a limited range by using AlN as the piezoelectrical material due to its process compatibility with microelectronics. One BSAC industrial member has developed a process to make PMUT...

The next big thing, AR/VR, requires an immersive Human Machine Interface (HMI) in addition to visual and sound stimuli. Although skin is the biggest organ in the human body, very few efforts compared to visual and auditory senses have been done to develop a “sense of touch”. The mechanical stimulus to generate the touch sense by the embedded mechanoreceptors in the skin at different depths has been created in many ways as vibratory actuators, microneedles, etc. In this project, we are investigating to create haptic interface via radiation force generated by piezoelectric...