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BPN785: Scandium AlN (ScAlN) for MEMS

Project ID BPN785
Website
Start Date Tue 2015-Feb-03 09:30:30
Last Updated Fri 2017-Sep-01 13:55:40
Abstract The goal of this project is to design, fabricate and characterize novel MEMS devices based on scandium aluminum nitride (ScAlN) thin films. ScAlN thin film is a promising piezoelectric material due to its CMOS process compatibility, low relative permittivity and high piezoelectric coefficient and enables better performance of piezoelectric MEMS devices.
Status Continuing
Funding Source BSAC Member Fees
IAB Research Area Physical Sensors & Devices
Researcher(s) Qi Wang
Advisor(s) David A. Horsley
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