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BPN764: Untethered Stress-Engineered MEMS MicroFlyers

Project ID BPN764
Website
Start Date Tue 2014-Aug-12 21:28:21
Last Updated Mon 2014-Aug-18 12:23:34
Abstract In this project, we are developing and testing microscale flying structures, called Microflyers. The microflyers consist of a 300 m 300 m sized chassis fabricated from polycrystalline silicon using surface micromachining. At present, the flyers are levitated using microfabricated heaters attached to an underlying substrate. A novel, in-situ masked post-release stress-engineering process is used to generate a concave upwards curvature of the flyers chassis, causing static pitch and roll stability during flight, take-off, and landing. The initial experiments have demonstrated stable levitation. The microflyers represent an attractive airborne reconnaissance platform due to their microscale size, and thus stealth operation.
Status New
Funding Source State
IAB Research Area Physical Sensors & Devices
Researcher(s) Omid Mahdavipour
Advisor(s) Igor Paprotny
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Summary Slide PDF | VIDEO
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