BERKELEY SENSOR & ACTUATOR CENTER
UC BERKELEY UC DAVIS
User: Guest |  Site Map |  My BSAC Profile
HOME  PROJECTS  THRUSTS  PUBLICATIONS  ABOUT BSAC  DIRECTORY  ALUMNI  FOR BSAC RESEARCHERS  EVENTS CALENDAR  SECURE LOGIN
Table of all Projects
     
 

BPN693: HEaTS: Thermally Stable Aluminum Nitride Lamb Wave Resonators for Harsh Environment Applications

Project ID BPN693
Website
Start Date Wed 2012-Aug-15 11:03:58
Last Updated Tue 2013-Aug-20 16:38:38
Abstract This project aims at developing high quality factor (Q), large coupling coeffecient (k2) aluminum nitride (AlN) Lamb wave resonators (LWRs) exhibiting low loss and thermally stable performance for wireless communications (e.g. oscillators or filters) in harsh environments. Current technology using thin AlN membrane structures have proved to enable a high phase velocity, low velocity dispersion of the Lamb wave employing the lowest order symmetric mode (S0), thus ensures a high frequency and offers robust designs with low sensitivity to technological tolerances. However, these devices do not allow for open bottom electrode configurations because of the low coupling coefficient, and the existence of the bottom electrode layer brings additional stress especially when temperature rises, which degrades Q and frequency stability. The goal of the thick AlN temperature compensated open bottom electrode LWR project is to develop thermally compensated LWRs with high Q and moderate coupling coefficient working at high temperatures.
Status Continuing
Funding Source DARPA
IAB Research Area Wireless, RF & Smart Dust
Researcher(s) Jie Zou, Chih-Ming Lin
Advisor(s) Albert P. Pisano
Detailed Information
Secure Access

Private Abstract
Research Report
Summary Slide
Active Feedback (or Request for Response)

 

  • Copyright Notification: All papers downloaded from this site are © University of California or the publisher, all rights reserved. Contact the BSAC Webmaster for permission related to copyrighted materials.
  • Links on these pages to commercial sites do not represent endorsements by UC or its affiliates.
  • Privacy Policy
  • Contact Us

   webmaster@bsac.eecs.berkeley.edu
  User logged in as: Guest
  User Idle since: April 18, 2014, 7:22 am